Apparatus and method of fabricating flat plate display

• US 8,961,851 B2
• Filed: 10/27/2010
• Issued: 02/24/2015
• Est. Priority Date: 12/23/2009
• Status: Expired due to Fees

• Current Assignee: LG Display Co., Ltd.
• Original Assignee: LG Display Co., Ltd.
• Inventors: Song, Tae-Joon, Cho, Seong-Pil, Kim, Ju-Hyuk
• Primary Examiner(s): Gupta, Yogendra
• Assistant Examiner(s): LE, NINH V
• Application Number:
  US12/913,649
• Publication Number:
  US 20110147990A1
• Time in Patent Office: 1,581 Days
• Field of Search: 264/319, 264/293, 264/299, 264/496, 425/385, 977/887
• US Class Current: 264/293
• CPC Class Codes: B29C 2043/025 forming a microstructure, i.e. fine patterning
• CPC Class Codes: B29C 2059/023 Microembossing
• CPC Class Codes: B29C 59/022 characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
• CPC Class Codes: B29C 59/026 of layered or coated substantially flat surfaces
• CPC Class Codes: B29K 2075/00 Use of PU, i.e. polyureas or polyurethanes or derivatives thereof, as moulding material
• CPC Class Codes: B29L 2007/001 having irregular or rough surfaces treads for tyres B29L2030/002
• CPC Class Codes: B29L 2009/00 Layered products
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G09F 9/30 in which the desired character or characters are formed by combining individual elements panels comprising a number of electrodes in a single cell controlling light arriving from an independent light source, e.g. electro-optical or magneto-optical cell, G02F1/00

Abstract

A fabricating apparatus and a method of a flat plate display are disclosed. A fabricating apparatus of a flat plate display includes a stage on which a substrate having liquid resin formed thereon is seated, a imprinting mold bonded with the liquid resin of the substrate to form a thin film pattern on the substrate, the imprinting mold comprises projections and grooves, and a planarization layer formed between the stage and the substrate to planarize a surface of the stage.

Claims

1. A fabricating method of a flat plate display comprising steps of:

forming a planarization layer on a stage to planarize a surface of the stage;

seating a substrate having liquid polymeric precursor formed thereon on the planarization layer;

bonding an imprinting mold and the substrate with each other, the imprinting mold comprising grooves and projections to press the liquid polymeric precursor to form a thin film pattern having a shape transferred from the imprinting mold; and

separating the substrate and the imprinting mold from each other,

wherein a rear surface of the planarization layer has non-uniform stress distribution corresponding to a non-uniform surface of the stage, and a front surface of the planarization layer has a planarized surface; and

wherein forming the planarization layer comprises;

forming a buffer layer of a single layer of polyurethane on the stage to disperse pressure generated during the bonding step and compensate for non-uniform stress distribution and thickness differences in the stage;

forming a slip layer on top of the buffer layer and directly contacting the substrate to reduce friction between the substrate and the stage, wherein the buffer layer is formed on a level closer to the stage than the slip layer; and

forming an adhesive layer between the buffer layer and the stage and between the buffer layer and the slip layer, wherein the adhesive layer is an acryl based material.

2. The fabricating method of claim 1, wherein coefficient of static friction of the slip layer is 1 or less.