Method of manufacturing photonic crystal and method of manufacturing surface-emitting laser

• US 8,962,356 B2
• Filed: 03/12/2013
• Issued: 02/24/2015
• Est. Priority Date: 03/23/2012
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Hoshino, Katsuyuki
• Primary Examiner(s): Smith, Zandra
• Assistant Examiner(s): Stevenson, Andre C
• Application Number:
  US13/796,322
• Publication Number:
  US 20130252360A1
• Time in Patent Office: 714 Days
• US Class Current: 438/22
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices
• CPC Class Codes: H01L 21/02389 Nitrides
• CPC Class Codes: H01L 21/02458 Nitrides
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/02603 Nanowires
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 21/02639 Preparation of substrate for selective deposition
• CPC Class Codes: H01L 21/02647 Lateral overgrowth
• CPC Class Codes: H01S 2304/00 Special growth methods for semiconductor lasers
• CPC Class Codes: H01S 5/11 Comprising a photonic bandgap structure
• CPC Class Codes: H01S 5/183 having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
• CPC Class Codes: H01S 5/30 Structure or shape of the active region; Materials used for the active region
• CPC Class Codes: H01S 5/34333 with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser

Abstract

Provided is a method of manufacturing a photonic crystal, including: a first step of forming, on a surface of a substrate, a protective mask for selective growth, the protective mask having an opening pattern opened therein; a second step of selectively growing a columnar semiconductor from an exposed portion of the surface of the substrate not having the mask formed thereon, laterally overgrowing the semiconductor layer on the mask, and embedding the mask; a third step of forming a photonic crystal in the semiconductor layer so that openings in the opening pattern and the one of pores and grooves which form the photonic crystal are at least partly overlapped each other when seen from a direction perpendicular to the surface of the substrate; a fourth step of removing at least part of the columnar semiconductor; and a fifth step of removing at least part of the mask.

Claims

1. A method of manufacturing a structure having periodically modulated refractive indices, the structure including a semiconductor layer in which at least one of pores and grooves are formed, the method comprising:

a first step of forming, on a surface of a substrate, a protective mask having an opening pattern;

a second step of forming a semiconductor layer on a top surface of the protective mask and an exposed portion of the surface of the substrate, which is exposed through the opening pattern of the protective mask, and embedding the protective mask;

a third step of forming the at least one of pores and grooves in the semiconductor layer so that the at least one of pores and grooves at least partly overlap the semiconductor layer formed on the exposed portion of the surface of the substrate as seen from a direction perpendicular to the surface of the substrate;

a fourth step of removing at least a part of the semiconductor layer formed on the exposed portion of the surface of the substrate; and

a fifth step of removing at least a part of the protective mask.

2. The method according to claim 1, wherein the opening pattern has a period which is coincident with a period of the one of pores and grooves.

3. The method according to claim 1, wherein openings in the opening pattern have a size which is equal to or smaller than a diameter or width of the at least one of pores and grooves.

4. The method according to claim 1, wherein each opening in the opening pattern is arranged so as to be within one of the at least one of pores and grooves as seen from the direction perpendicular to the surface of the substrate.

5. The method according to claim 1, wherein:

the semiconductor layer and the substrate are formed of a semiconductor having conductivity;

one of the substrate and the semiconductor layer includes an active layer;

the opening pattern includes a first opening pattern and a second opening pattern;

the first opening pattern is an opening pattern for forming the semiconductor layer;

the second opening pattern is an opening pattern for forming a structure for injecting current into the active layer;

the third step comprises forming the at least one of pores and grooves so that the at least one of pores and grooves overlap the first opening pattern other than the second opening pattern at least partly as seen from the direction perpendicular to the surface of the substrate; and

the fourth step comprises removing at least part of the semiconductor layer formed in regions corresponding to first opening pattern.

6. The method according to claim 5, wherein the first opening pattern has a period which is coincident with a period of the at least one of pores and grooves.

7. The method according to claim 5, wherein openings in the first opening pattern have a size which is equal to or smaller than a diameter or a width of the at least one of pores and grooves.

8. The method according to claim 5, wherein each opening in the first opening pattern is arranged so as to be within one of the at least one of pores and grooves as seen from the direction perpendicular to the surface of the substrate.

9. The method according to claim 1, wherein the fourth step comprises forming an air gap in at least part of a region below the structure by removing at least part of the semiconductor layer formed on the exposed portion of the surface of the substrate via the at least one of pores and grooves.

10. The method according to claim 1, wherein the fifth step comprises forming an air gap in at least part of a region below the structure by removing at least part of the protective mask via the at least one of pores and grooves.

11. The method according to claim 1, wherein the protective mask comprises at least one of silicon oxide, silicon nitride, zirconium oxide, and titanium oxide.

12. The method according to claim 1, wherein the removing of the protective mask is carried out by wet etching.

13. The method according to claim 1, wherein the semiconductor layer comprises a nitride semiconductor.

14. The method according to claim 1, wherein the structure is a two-dimensional photonic crystal.

15. The method according to claim 1, wherein the structure is a one-dimensional photonic crystal.

16. The method according to claim 1, wherein the structure is a high contrast grating.

17. A method of manufacturing a surface-emitting laser, the method comprising the method according to claim 1.

18. The method of manufacturing a surface-emitting laser according to claim 17, wherein the structure is a two-dimensional photonic crystal.

19. The method of manufacturing a surface-emitting laser according to claim 17, wherein the structure is a high contrast grating.

20. The method of manufacturing a surface-emitting layer according to claim 17, wherein the structure is a one-dimensional photonic crystal.