Method for producing a semiconductor chip emitting radiation, semiconductor chip emitting radiation, and component emitting radiation

• US 8,962,361 B2
• Filed: 11/23/2011
• Issued: 02/24/2015
• Est. Priority Date: 12/03/2010
• Status: Active Grant

• Current Assignee: OSRAM OLED GMBH (Ams-Osram AG)
• Original Assignee: Osram Opto Semiconductors GmbH (Ams-Osram AG)
• Inventors: Petersen, Kirstin, Baumann, Frank, Eisert, Dominik, Cui, Hailing
• Primary Examiner(s): CHAUDHARI, CHANDRA P
• Application Number:
  US13/991,408
• Publication Number:
  US 20140008683A1
• Time in Patent Office: 1,189 Days
• Field of Search: 438/28, 438/35
• US Class Current: 438/29
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2933/0041 relating to wavelength conversion elements
• CPC Class Codes: H01L 33/50 Wavelength conversion elements
• CPC Class Codes: H01L 33/504 Elements with two or more wavelength conversion materials
• CPC Class Codes: H01L 33/505 characterised by the shape, e.g. plate or foil

Abstract

A method is provided for producing a radiation-emitting semiconductor chip, in which a first wavelength-converting layer is applied over the radiation exit face of a semiconductor body. The application method is selected from the following group: sedimentation, electrophoresis. In addition, a second wavelength-converting layer is applied over the radiation exit face of the semiconductor body. The second wavelength-converting layer is either produced in a separate method step and then applied or the application method is sedimentation, electrophoresis or printing. Furthermore, a radiation-emitting semiconductor chip and a radiation-emitting component are provided.

Claims

1. A method for producing a radiation-emitting semiconductor chip, the method comprising:

providing a semiconductor body configured to emit electromagnetic radiation of a first wavelength range from a radiation exit face;

applying a first wavelength-converting layer with a first wavelength conversion material, which converts radiation of the first wavelength range into radiation of a second wavelength range, over the radiation exit face of the semiconductor body, the first wavelength-converting layer being applied by sedimentation or electrophoresis; and

applying a second wavelength-converting layer with a second wavelength conversion material, which converts radiation of the first wavelength range into radiation of a third wavelength range, over the radiation exit face of the semiconductor body, the second wavelength-converting layer either being produced in a separate method step and then applied or being applied by;

sedimentation, electrophoresis, or printing;

wherein, if the first and/or second wavelength converting layer is applied by electrophoresis, then the layer has particle density higher or equal to 50 Vol %; and

wherein, if the first and/or second wavelength converting layer is applied by sedimentation, then the layer has a particle density between 20 Vol % and 35 Vol %, limits included.

2. The method according to claim 1, wherein the second wavelength converting layer is produced in a separate method step.

3. The method according to claim 2, wherein the second wavelength is the second wavelength-converting layer is applied by injection molding or sintering.

4. The method according to claim 1, wherein the first wavelength-converting layer and the second wavelength-converting layer form a common boundary surface.

5. The method according to claim 1, wherein the first wavelength-converting layer or the second wavelength-converting layer is applied in direct contact to the radiation exit face of the semiconductor body.

6. The method according to claim 1, wherein the first wavelength conversion material and/or the second wavelength conversion material comprises a material selected from the group consisting of rare earth metal-doped garnet, rare earth metal-doped alkaline earth metal sulfides, rare earth metal-doped thiogallates, rare earth metal-doped aluminates, rare earth metal-doped orthosilicates, rare earth metal-doped chlorosilicates, rare earth metal-doped alkaline earth silicon nitrides, rare earth metal-doped oxynitrides and rare earth metal-doped aluminum oxynitrides, rare earth metal-doped silicon nitrides, wavelength conversion material system based on oxides, wavelength conversion material system based on nitrides, wavelength conversion material system based on sulfides, wavelength conversion material system based on selenides, and wavelength conversion material system based on silicon oxynitrides.

7. The method according to claim 1, wherein the wavelength-converting layer with the wavelength conversion material which converts radiation of the first wavelength range into a longer wavelength range than the other wavelength conversion material is arranged closer to the semiconductor body than the other wavelength-converting layer with the other wavelength conversion material.

8. The method according to claim 1, wherein particles of the second wavelength conversion material or particles of the first wavelength conversion material within the respective wavelength-converting layer have a particle density greater than or equal to 20 vol. %.

9. The method according to claim 1, wherein particles of the second wavelength conversion material exhibit a particle density of between 10 vol. % and 100 vol. %, limit values included.

10. The method according to claim 1, wherein the particles of the first and/or second wavelength conversion material exhibit a diameter of between 2 μ

m and 20 μ

m, limit values included.

11. The method according to claim 1, wherein side faces of the semiconductor body are completely covered with the first wavelength-converting layer.

12. The method according to claim 1, wherein side faces of the wavelength-converting layer arranged closer to the semiconductor body are completely covered by the other wavelength-converting layer.

13. A radiation-emitting semiconductor chip, which is produced by a method according to claim 1.

14. The radiation-emitting semiconductor chip according to claim 13, wherein the second wavelength-converting layer is arranged in direct contact with the radiation exit face of the semiconductor body and the first wavelength-converting layer is applied in direct contact to the second wavelength-converting layer, wherein the first wavelength-converting layer completely covers one major face of the second wavelength-converting layer, side faces of the second wavelength-converting layer and side faces of the semiconductor body.

15. The radiation-emitting semiconductor chip according to claim 13, wherein the first wavelength-converting layer is arranged in direct contact with the radiation exit face and side faces of the semiconductor body and the second wavelength-converting layer is applied in direct contact to the first wavelength-converting layer.

16. A radiation-emitting component, comprising a semiconductor chip according to claim 1 arranged on a carrier or in the recess of a component package.

17. A method for producing a radiation-emitting semiconductor chip, the method comprising:

providing a semiconductor body configured to emit electromagnetic radiation of a first wavelength range from a radiation exit face,

applying a first wavelength-converting layer with a first wavelength conversion material, which converts radiation of the first wavelength range into radiation of a second wavelength range, over the radiation exit face of the semiconductor body, the first wavelength-converting layer applied by sedimentation or electrophoresis, and

applying a second wavelength-converting layer with a second wavelength conversion material, which converts radiation of the first wavelength range into radiation of a third wavelength range, over the radiation exit face of the semiconductor body, the second wavelength-converting layer either being produced in a separate method step and then applied or being applied by sedimentation, electrophoresis, or printing.