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Multi-nozzle organic vapor jet printing

  • US 8,962,383 B2
  • Filed: 04/07/2014
  • Issued: 02/24/2015
  • Est. Priority Date: 08/27/2012
  • Status: Active Grant
First Claim
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1. A method of depositing a thin film on a substrate comprising:

  • ejecting a carrier gas and a material from a plurality of nozzles while moving the nozzles or the substrate relative to one another,wherein the material is deposited on the substrate from at least two of the nozzles, the at least two of the nozzles including different geometries;

    wherein the at least two nozzles include two or more relatively small nozzles and a relatively large nozzle, the relatively small nozzles being disposed adjacent to the relatively large nozzle; and

    wherein the two or more relatively small nozzles are disclosed on opposite sides of the relatively large nozzle.

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