Multi-nozzle organic vapor jet printing
First Claim
1. A method of depositing a thin film on a substrate comprising:
- ejecting a carrier gas and a material from a plurality of nozzles while moving the nozzles or the substrate relative to one another,wherein the material is deposited on the substrate from at least two of the nozzles, the at least two of the nozzles including different geometries;
wherein the at least two nozzles include two or more relatively small nozzles and a relatively large nozzle, the relatively small nozzles being disposed adjacent to the relatively large nozzle; and
wherein the two or more relatively small nozzles are disclosed on opposite sides of the relatively large nozzle.
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Accused Products
Abstract
Systems and methods are provided for depositing thin patterned films of materials in which individual elements of the patterned film are deposited by two or more nozzles having different geometries. The different nozzle geometries may include one or more of different throttle diameters, different exhaust diameters, different cross-sectional shapes, different bore angles, different wall angles, different exhaust distances from the substrate, and different leading edges relative to the direction of movement of the nozzles or the substrate. Methods may include steps of ejecting a carrier gas and a material from a plurality of nozzles and depositing the material on a substrate in a plurality of laterally spaced elements.
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Citations
20 Claims
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1. A method of depositing a thin film on a substrate comprising:
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ejecting a carrier gas and a material from a plurality of nozzles while moving the nozzles or the substrate relative to one another, wherein the material is deposited on the substrate from at least two of the nozzles, the at least two of the nozzles including different geometries; wherein the at least two nozzles include two or more relatively small nozzles and a relatively large nozzle, the relatively small nozzles being disposed adjacent to the relatively large nozzle; and wherein the two or more relatively small nozzles are disclosed on opposite sides of the relatively large nozzle. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An apparatus for depositing a thin film of material on a substrate, comprising:
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a plurality of nozzles in fluid communication with a carrier has and a material to be deposited; and a translation mechanism configured to move at least one of the substrate and the plurality of nozzles, relative to one another, during a deposition process, wherein, at least two of the nozzles include different geometries; wherein the at least two nozzles include two or more relatively small nozzles and a relatively large nozzle, the relatively small nozzles being disposed adjacent to the relatively large nozzle; and wherein the two or more relatively small nozzles are disposed on opposite sides of the relatively large nozzle. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification