Control device for a micromirror, method for controlling a micromirror and image projection system
First Claim
Patent Images
1. A method for controlling a micro-mirror, the method comprising:
- generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency;
generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency;
modulating the second control signal by binary modulation of the second control signal, at the first frequency; and
controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.
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Abstract
A method for controlling a micro-mirror, having the following: generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; modulating the second control signal by binary modulation of the second control signal, at the first frequency; and controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.
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Citations
9 Claims
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1. A method for controlling a micro-mirror, the method comprising:
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generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; modulating the second control signal by binary modulation of the second control signal, at the first frequency; and controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal. - View Dependent Claims (2, 3, 4, 5)
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6. A control device for controlling a micro-mirror, comprising:
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a first signal generator which is configured to generate a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; a second signal generator which is configured to generate a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; a modulator which is connected to the first signal generator and the second signal generator and which is configured to modulate the second control signal by binary modulation of the second control signal, at the first frequency; and an actuator device which is connected to the modulator and which is configured to control force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal. - View Dependent Claims (7, 8)
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9. An image projection system, comprising:
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a micro-mirror system which includes at least one micro-mirror having a plurality of force coupling elements; an image generation device which is configured to generate light beams according to predetermined image data and to direct the light beams onto the at least one micro-mirror of the micro-mirror system; an image data generation device which is configured to generate predetermined image data and to supply same to the image generation device; and a control device, which is configured to generate tilting motions of the at least one micro-mirror by controlling the plurality of force coupling elements so that the light beams generated by the image generation device are deflected by the at least one micro-mirror to generate an image which corresponds to the image data control device for controlling a micro-mirror, wherein the control device includes; a first signal generator which is configured to generate a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency; a second signal generator which is configured to generate a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency; a modulator which is connected to the first signal generator and the second signal generator and which is configured to modulate the second control signal by binary modulation of the second control signal, at the first frequency; and an actuator device which is connected to the modulator and which is configured to control force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.
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Specification