Reducing the spectral bandwidth of lasers

• US 8,964,798 B2
• Filed: 07/10/2013
• Issued: 02/24/2015
• Est. Priority Date: 07/12/2012
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Armstrong, J. Joseph
• Primary Examiner(s): NGUYEN, DUNG T
• Application Number:
  US13/939,000
• Publication Number:
  US 20140016655A1
• Time in Patent Office: 594 Days
• Field of Search: 372/4, 372/6, 372 21- 22, 372/29.021, 372/69
• US Class Current: 372/6
• CPC Class Codes: G01N 21/00 Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light G01N3/00 - G01N19/00 take precedence
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: H01S 2301/08 Generation of pulses with special temporal shape or frequency spectrum
• CPC Class Codes: H01S 3/0057 Temporal shaping, e.g. pulse compression, frequency chirping soliton generation and propagation G02F1/3513, H01S3/063 and H01S3/108
• CPC Class Codes: H01S 3/0092 Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity nonlinear frequency conversion per se G02F1/35
• CPC Class Codes: H01S 3/02 Constructional details housings or packages of fibre lasers H01S3/06704
• CPC Class Codes: H01S 3/06754 Fibre amplifiers H01S3/06708 takes precedence
• CPC Class Codes: H01S 3/06758 Tandem amplifiers
• CPC Class Codes: H01S 3/10 Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
• CPC Class Codes: H01S 3/30 using scattering effects, e.g. stimulated Brillouin or Raman effects
• CPC Class Codes: H01S 3/302 in an optical fibre

Abstract

A laser system for semiconductor inspection includes a fiber-based fundamental light source for generating fundamental light that is then converted/mixed by a frequency conversion module to generate UV-DUV laser light. The fundamental light source includes a nonlinear chirp element (e.g., a Bragg grating or an electro-optic modulator) that adds a nonlinear chirp to the seed light laser system prior to amplification by the fiber amplifier(s) (e.g., doped fiber or Raman amplifiers). The nonlinear chirp includes an x² or higher nonlinearity and is configured to compensate for the Self Phase Modulation (SPM) characteristics of the fiber-based amplifiers such that fundamental light is generated that has a spectral E95 bandwidth within five times that of the seed light. When multiple series-connected amplifiers are used, either a single nonlinear chirp element is provided before the amplifier string, or chirp elements are included before each amplifier.

Claims

1. A laser system for generating laser output light having a nominal UV-DUV output frequency, the laser system comprising:

a fiber-based fundamental light source for generating fundamental light at a nominal fundamental frequency including;

one or more seed lasers including means for generating seed light having an initial peak power and an initial spectral bandwidth, and for transmitting the seed light along an optical path;

one or more amplifiers disposed in the optical path and including means for amplifying the seed light generated by said one or more seed lasers such that amplified light output from the one or more amplifiers has a fundamental peak power that is substantially higher than the initial peak power; and

one or more nonlinear chirp elements disposed in the optical path for combining one of the seed light and the amplified light with one or more nonlinear chirps; and

a frequency conversion module including means for converting said fundamental light from said nominal fundamental frequency to said laser output light L having said nominal output frequency,

wherein the one or more amplifiers have inherent Self Phase Modulation (SPM) characteristics, and

wherein the nonlinear chirp compensates for said SPM characteristics of the one or more amplifiers such that said fundamental light generated by said laser system has a fundamental spectral bandwidth that is in a range defined by five times said initial spectral bandwidth of said seed light.

2. The laser system of claim 1, wherein said frequency conversion module including means for generating laser output light such that said output frequency is more than 2.5 times said nominal fundamental frequency.

3. The laser system of claim 2,

wherein said one or more seed lasers and said one or more amplifiers comprise means for generating said fundamental light such that said nominal fundamental frequency is a frequency having a corresponding wavelength of approximately 1 μ

m, and

wherein said frequency conversion module including means for generating said laser output light such that said output frequency is a frequency having a corresponding wavelength in a range of 190 nm and 400 nm.

4. The laser system of claim 1, wherein each of said one or more seed lasers comprises one of a pulsed light oscillator, a solid state laser, a diode laser, a gain-switched laser diode, and a quantum dot laser.

5. The laser system of claim 1, wherein said one or more amplifiers comprise one of a doped fiber amplifier and a Raman amplifier.

6. The laser system of claim 1, further comprising a pump seed laser for transmitting pump seed light to said one or more amplifiers.

7. The laser system of claim 1, wherein each of said one or more nonlinear chirp elements comprises one of a Bragg grating, a fiber Bragg grating and an electro-optic modulator.

8. The laser system of claim 7, wherein said one or more nonlinear chirp elements comprise means for generating said nonlinear pre-chirp with a nonlinearity on the order of x² or higher.

9. The laser system of claim 7, wherein said one or more nonlinear chirp elements comprise means for generating said nonlinear pre-chirp U(0,T) having time-based frequency characterized by the equation

10. The laser system of claim 1,

wherein one or more nonlinear chirp elements are disposed between the one or more seed lasers and the one or more amplifiers in the optical path such that modified seed light exiting the one or more nonlinear chirp elements has a modified power that is substantially equal to said initial peak power and a modified spectral bandwidth, that is different from said initial spectral bandwidth, and

wherein said one or more amplifiers includes means for amplifying the modified seed light such that said nominal fundamental frequency of said fundamental light is in the UV-DUV range.

11. The laser system of claim 10, wherein said one or more amplifiers comprises a plurality of amplifiers connected in series in said optical path.

12. The laser system of claim 1, wherein said one or more amplifiers comprises a plurality of amplifiers including a first amplifier and a second amplifier, and

wherein said one or more nonlinear chirp elements comprise at least one nonlinear chirp elements disposed between said first and second amplifiers in said optical path.

13. The laser system of claim 1,

wherein said one or more seed lasers comprises a continuous wave (CW) laser for generating CW seed light and a pulsed laser for generating pulsed pump seed light,

wherein said one or more amplifiers comprises a Raman amplifier disposed to receive said CW seed light and said pulsed pump seed light,

wherein said one or more nonlinear chirp elements comprises a phase modulator disposed in the optical path between the Raman amplifier and the CW laser such that said Raman amplifier receives both said CW seed light and said nonlinear chirp from said phase modulator.

14. The laser system of claim 13,

wherein said CW laser comprises one of a solid state laser, a diode laser and a quantum dot laser, and

wherein said pulsed laser comprises one of a gain-switched laser diode and a pulsed light oscillator.

15. The laser system of claim 13,

wherein said said one or more amplifiers comprises a second Raman amplifier disposed in the optical path to receive amplified light output from said Raman amplifier, and

wherein said one or more seed lasers further comprises a second pulsed laser disposed to transmit second pulsed pump seed light into said second Raman amplifier.