×

Capacitive ceramic pressure measuring cell and pressure sensor with such a pressure measuring cell

  • US 8,966,989 B2
  • Filed: 06/22/2010
  • Issued: 03/03/2015
  • Est. Priority Date: 07/15/2009
  • Status: Active Grant
First Claim
Patent Images

1. A capacitive, ceramic, pressure measuring cell, comprising:

  • a ceramic platform; and

    a ceramic measuring membrane, which is pressure tightly connected along a peripheral joint with a front side of said platform, forming a reference pressure chamber between said platform and said measuring membrane, wherein;

    said measuring membrane has at least a first electrode, which faces said platform;

    said platform has at least a second electrode, which faces said measuring membrane;

    the capacitance between said first electrode and said second electrode depends on a difference between a pressure externally acting on said measuring membrane and a pressure existing in said reference pressure chamber;

    said joint has a thickness, which defines an equilibrium distance between said measuring membrane and the front side of said platform;

    on the front side of said platform, a support layer is arranged, which comprises an inorganic insulator;

    said support layer has a thickness of at least 0.2 times said thickness of said joint; and

    said second electrode is arranged on said support layer.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×