Method of manufacturing organic light-emitting display apparatus

• US 8,969,110 B2
• Filed: 12/18/2013
• Issued: 03/03/2015
• Est. Priority Date: 07/25/2013
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Choi, Jai-Hyuk
• Primary Examiner(s): Sarkar, Asok K
• Application Number:
  US14/132,394
• Publication Number:
  US 20150031152A1
• Time in Patent Office: 440 Days
• Field of Search: 438/26, 438/28, 438/783, 438/784, 438/958
• US Class Current: 438/26
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 59/873 Encapsulations
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/40 Thermal treatment, e.g. annealing in the presence of a solvent vapour
• CPC Class Codes: Y02E 10/549 Organic PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10S 438/958 Passivation layer

Abstract

A method of manufacturing an organic light-emitting display apparatus includes: providing an organic light emission part on a substrate; providing a first inorganic layer including a first low temperature viscosity transition (“LVT”) inorganic material on the substrate to cover the organic light emission part; and adding fluoride into the first inorganic layer using a fluorine group material such that the first inorganic layer is converted into a second inorganic layer comprising a second low temperature viscosity transition inorganic material.

Claims

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:

providing an organic light emission part on a substrate;

providing a first inorganic layer comprising a first low temperature viscosity transition inorganic material on the substrate to cover the organic light emission part; and

adding fluoride into the first inorganic layer using a fluorine group material such that the first inorganic layer is converted into a second inorganic layer comprising a second low temperature viscosity transition inorganic material.

2. The method of claim 1, wherein the adding fluoride into the first inorganic layer comprises using a plasma processing process.

3. The method of claim 1, wherein the adding fluoride into the first inorganic layer comprises using an ion injection process.

4. The method of claim 1, wherein the fluorine group material comprises sulfur fluoride (SF₆), carbon fluoride (CF₄), or a combination thereof.

5. The method of claim 1, wherein the first low temperature viscosity transition inorganic material comprises a tin oxide.

6. The method of claim 1, wherein

the first low temperature viscosity transition inorganic material comprises a tin oxide (SnO), and further comprises a phosphorous oxide (P₂O₅), a boron phosphate (BPO₄), a niobium oxide (NbO), a zinc oxide (ZnO), a titanium oxide (TiO₂), a tungsten oxide (W₃O), or a combination thereof.

7. The method of claim 1, wherein a viscosity transition temperature of the second low temperature viscosity transition inorganic material is lower than a viscosity transition temperature of the first low temperature viscosity transition inorganic material.

8. The method of claim 1, wherein the first inorganic layer comprises tin phosphate glass (SnO—

P₂O₅).

9. The method of claim 1, wherein the second inorganic layer further comprises tin fluoride phosphate glass (SnO—

P₂O₅—

SnF₂).

10. The method of claim 1, wherein the substrate is a flexible substrate.

11. A method of manufacturing an organic light-emitting display apparatus, the method comprising:

providing an organic light emission part on a substrate;

providing a first inorganic layer comprising a first low temperature viscosity transition inorganic material on the substrate to cover the organic light emission part;

adding fluoride into the first inorganic layer using a fluorine group material such that the first inorganic layer is converted into a second inorganic layer comprising a second low temperature viscosity transition inorganic material; and

performing a healing operation on the second inorganic layer by heat-treating the second inorganic layer at a predetermined temperature equal to or higher than a viscosity transition temperature of the second low temperature viscosity transition inorganic material such that the second inorganic layer is converted into a third inorganic layer.

12. The method of claim 11, wherein the second low temperature viscosity transition inorganic material is formed by doping fluoride into the first low temperature viscosity transition inorganic material or substituting a portion of the first low temperature viscosity transition inorganic material with fluoride.

13. The method of claim 11, wherein the predetermined temperature is lower than a denaturalization temperature of a material of the organic light emission part.

14. The method of claim 11, wherein the healing operation is performed under a vacuum atmosphere or an inert gas atmosphere.

15. The method of claim 11, wherein the first low temperature viscosity transition inorganic material comprises tin phosphate glass (SnO—

P₂O₅).

16. The method of claim 11, wherein the third inorganic layer comprises tin fluoride phosphate glass (SnO—

P₂O₅—

SnF₂).

17. The method of claim 11, wherein the adding fluoride into the first inorganic layer comprises using a plasma processing process.

18. The method of claim 11, wherein the viscosity transition temperature of the second low temperature viscosity transition inorganic material is lower than a viscosity transition temperature of the first low temperature viscosity transition inorganic material.

19. The method of claim 11, wherein the viscosity transition temperature of the second low temperature viscosity transition inorganic material is lower than a denaturalization temperature of a material of the organic light emission part.

20. The method of claim 11, wherein

the organic light emission part comprises a plurality of organic light-emitting devices,

wherein each of the organic light-emitting devices comprises a first electrode, a second electrode, and an organic light emission layer disposed between the first electrode and the second electrode.