Reliability metal traces
First Claim
Patent Images
1. A touch sensor panel including a viewing area and improved reliability conductive traces for carrying signals on a touch sensor panel, comprising:
- a first layer of Molybdenum Niobium (Mo/Nb) formed on a substrate;
a second layer of Aluminum Neodymium (Al/Nd) formed on the first layer, the first layer for adhering the second layer to the substrate;
a third layer of the Molybdenum Niobium (Mo/Nb) formed on the second layer, the third layer for protecting the second layer; and
an organic polymer photoimageable passivation layer formed on the third layer without overlapping with the viewing area;
wherein the first, second and third layers are patterned to form the conductive traces and fully sealed over the substrate by only the organic polymer photoimageable passivation layer.
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Accused Products
Abstract
The formation of improved reliability conductive traces in touch sensor panels that are less prone to failures due to environmental effects is disclosed. Conductive traces, which can be formed from a stackup of metal layers or a single metal layer, can be protected with an additional photoimageable passivation layer of a material such as an organic polymer. This photoimageable coating can be patterned so that it does not appear in the visible area of the touch sensor panel, with much finer tolerances than conventional passivation layers to help keep product dimensions to a minimum.
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Citations
21 Claims
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1. A touch sensor panel including a viewing area and improved reliability conductive traces for carrying signals on a touch sensor panel, comprising:
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a first layer of Molybdenum Niobium (Mo/Nb) formed on a substrate; a second layer of Aluminum Neodymium (Al/Nd) formed on the first layer, the first layer for adhering the second layer to the substrate; a third layer of the Molybdenum Niobium (Mo/Nb) formed on the second layer, the third layer for protecting the second layer; and an organic polymer photoimageable passivation layer formed on the third layer without overlapping with the viewing area; wherein the first, second and third layers are patterned to form the conductive traces and fully sealed over the substrate by only the organic polymer photoimageable passivation layer. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A touch sensor panel including a viewing area and improved reliability conductive traces for carrying signals on a touch sensor panel, comprising:
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a Molybdenum Niobium (Mo/Nb) layer patterned on a substrate to form the conductive traces with controlled wall angles; and an organic polymer photoimageable passivation layer formed over the conductive traces without overlapping with the viewing area, wherein the Mo/Nb layer is fully sealed over the substrate by only the organic polymer photoimageable passivation layer. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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15. A touch sensor panel including a viewing area and improved reliability conductive traces for carrying signals on a touch sensor panel, comprising:
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a first layer of Molybdenum Niobium (Mo/Nb) formed on a substrate; a second layer of a second conductive material formed on the first layer, the first and second layers configured as transparent conductive electrodes and border electrical connections; and an organic polymer photoimageable passivation layer formed over the first and second layers without overlapping with the viewing area, wherein the first and second layers are fully sealed over the substrate by only the organic polymer photoimageable passivation layer. - View Dependent Claims (16, 17, 18, 19)
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20. A mobile telephone including a touch sensor panel including a viewing area and containing a plurality of improved reliability conductive traces, the improved reliability conductive traces comprising:
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a first layer of Molybdenum Niobium (Mo/Nb) formed on a substrate; a second layer of Aluminum Neodymium (Al/Nd) formed on the first layer, the first layer for adhering the second layer to the substrate; a third layer of Molybdenum Niobium (Mo/Nb) formed on the second layer, the third layer for protecting the second layer; and an organic polymer photoimageable passivation layer formed on the third layer without overlapping with the viewing area; wherein the first, second and third layers are patterned to form the conductive traces and fully sealed over the substrate by only the organic polymer photoimageable passivation layer.
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21. A digital media player including a touch sensor panel including a viewing area and containing a plurality of improved reliability conductive traces, the improved reliability conductive traces comprising:
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a Molybdenum Niobium (Mo/Nb) layer with a thickness of between 3000-5000 angstroms formed and patterned on a substrate to form the conductive traces with controlled wall angles; and an organic polymer photoimageable passivation layer with a thickness of at least 2.0 microns formed over the conductive traces without overlapping with the viewing area, wherein the Mo/Nb layer is fully sealed over the substrate by only the organic polymer photoimageable passivation layer.
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Specification