Methods of manufacturing a micro-electro-mechanical system (MEMS) structure
First Claim
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1. A method of forming a Micro-Electro-Mechanical System (MEMS) structure, comprising:
- forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode;
forming a MEMS beam above the wiring layer;
forming at least one spring attached to at least one end of the MEMS beam; and
forming an array of mini-bumps between the wiring layer and the MEMS beam.
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Abstract
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode. The method further includes forming a MEMS beam above the wiring layer. The method further includes forming at least one spring attached to at least one end of the MEMS beam. The method further includes forming an array of mini-bumps between the wiring layer and the MEMS beam.
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Citations
18 Claims
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1. A method of forming a Micro-Electro-Mechanical System (MEMS) structure, comprising:
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forming a wiring layer on a substrate comprising actuator electrodes and a contact electrode; forming a MEMS beam above the wiring layer; forming at least one spring attached to at least one end of the MEMS beam; and forming an array of mini-bumps between the wiring layer and the MEMS beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification