Micro-electro-mechanical transducer having an optimized non-flat surface
First Claim
1. A micro-electro-mechanical transducer comprising:
- a first layer having a first internal surface;
a second layer having a second internal surface opposing the first internal surface of the first layer to define a gap therebetween, wherein at least one of the first internal surface and the second internal surface is non-flat defining, at least in part, a concave curve shape profile having at least a first zone and a second zone, the first zone defining a first width of the gap, and the second zone defining a second width of the gap; and
a transducing member movable with at least one of the first layer and the second layer.
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Abstract
A micro-electro-mechanical transducer (such as a cMUT) having a non-flat surface is disclosed. The non-flat surface may include a variable curve or slope in an area where a spring layer contacts a support, thus making a variable spring model as the spring layer vibrates. The non-flat surface may be that of a non-flat electrode optimized to compensate the dynamic deformation of the other electrode during operation and thus enhance the uniformity of the dynamic electrode gap during operation. Methods for fabricating the micro-electro-mechanical transducer are also disclosed. The methods may be used in both conventional membrane-based cMUTs and cMUTs having embedded springs transporting a rigid top plate.
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Citations
71 Claims
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1. A micro-electro-mechanical transducer comprising:
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a first layer having a first internal surface; a second layer having a second internal surface opposing the first internal surface of the first layer to define a gap therebetween, wherein at least one of the first internal surface and the second internal surface is non-flat defining, at least in part, a concave curve shape profile having at least a first zone and a second zone, the first zone defining a first width of the gap, and the second zone defining a second width of the gap; and a transducing member movable with at least one of the first layer and the second layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 52, 53, 54, 55)
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27. A micro-electro-mechanical transducer comprising:
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a base layer including a first electrode; a spring layer including a second electrode separated from the first electrode defining an electrode gap therebetween; and a support member supporting the spring layer such that the spring layer is adapted for vibration relative to the base layer during transmitting or receiving a signal, wherein one of the first electrode and the second electrode has a deformable area subject to deformation during operation, and the other electrode has a non-flat at least partially concave curved area at least partially conformed to the deformation of the deformable area of the one of the first electrode and the second electrode to increase uniformity of the electrode gap during operation. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 56)
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39. A method for fabricating a micro-electro-mechanical transducer, the method comprising:
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growing and patterning a diffusion barrier layer over a surface of a base layer, the diffusion barrier layer having an opening leaving a corresponding part of the surface of the base layer uncovered; performing a diffusion process over the diffusion barrier layer including the opening such that a diffusion reactivated material reaches a first depth into the base layer at where the opening is located and a second depth into the base layer at positions covered by the diffusion barrier layer, the first depth being greater than the second depth; removing the diffusion barrier layer and the diffusion reactivated material to form a recess on the surface of the base layer; forming a cover layer over the recess on the base layer to define a gap therebetween; and forming a transducing member movable with at least one of the base layer or the cover layer. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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57. A method of fabricating a micro-electro-mechanical transducer comprising:
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forming a first layer having a first internal surface; forming a second layer having a second internal surface opposing the first internal surface of the first layer to define a gap therebetween, wherein at least one of the first internal surface and the second internal surface is non-flat defining, at least in part, a concave curve shape profile having at least a first zone and a second zone, the first zone defining a first width of the gap, and the second zone defining a second width of the gap; and forming a transducing member movable with at least one of the first layer and the second layer. - View Dependent Claims (58, 59, 60, 61, 62, 63, 64)
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65. A method for fabricating a micro-electro-mechanical transducer, the method comprising:
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oxidizing a surface of a first layer to form an oxide layer; removing the oxide layer to create a recess in the first layer, wherein at least a portion of the recess includes a concave curve shape; and forming a second layer over the recess on the first layer to define a gap, the second layer having a deformable area, wherein the recess is at least partially conformed to deformation of the deformable area of the second layer. - View Dependent Claims (66, 67, 68, 69, 70, 71)
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Specification