Terahertz dispersive spectrometer system

• US 8,981,296 B2
• Filed: 02/06/2012
• Issued: 03/17/2015
• Est. Priority Date: 11/06/2007
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cox, James A., Fritz, Bernard S., Nusseibeh, Fouad
• Primary Examiner(s): Green, Yara B
• Application Number:
  US13/367,209
• Publication Number:
  US 20120199743A1
• Time in Patent Office: 1,135 Days
• Field of Search: 250/338.4, 250/338.1, 257/432, 338/18
• US Class Current: 250/338.1
• CPC Class Codes: G01J 3/42 Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry beam switching arrangements G01J3/08
• CPC Class Codes: G01J 5/0837 Microantennas, e.g. bow-tie
• CPC Class Codes: G01N 21/3563 for analysing solids; Preparation of samples therefor
• CPC Class Codes: G01N 21/3577 for analysing liquids, e.g. polluted water
• CPC Class Codes: G01N 21/3581 using far infrared light; using Terahertz radiation

Abstract

A spectrometer system for providing information about a target with terahertz radiation. The system may receive incident radiation from the target through fore optics, a slit aperture, secondary optics and a dispersive element which images a slit on an array of terahertz sensitive detectors. The detectors may include uncooled sensors. Each sensor may be connected to its own micro antenna. The array of detectors may be situated proximate to the dispersive element so that radiation from the element may be dispersed according to wavelength to the respective detectors optimally sensitive to the various respective wavelengths. Detector signals indicating the impingement of terahertz radiation may provide information for identifying a material of the target.

Claims

1. A non-imaging dispersive spectrometer system comprising:

a terahertz radiation source for illuminating a target;

a slit aperture;

fore-optics configured to focus incident radiation reflected or emanated from the target to the slit aperture

a dispersive element;

secondary optics configured to collimate the radiation from the slit aperture to the dispersive element; and

one or more thermoelectric terahertz detectors in an optical path from the dispersive element, the one or more detectors each comprising an uncooled, thermally isolated sensor and a micro antenna connected to the uncooled sensor;

wherein the one or more detectors are arranged according to their optimal sensitivity in a spectral range of interest as defined by the dispersive range of the dispersive element and the one or more detectors form a linear array; and

wherein the thermally isolated sensor of the one or more thermoelectric terahertz detectors comprises;

a microbridge, the microbridge comprising;

a first dielectric layer;

a first metal layer extending from a mid-portion of the microbridge to a first antenna contact pad;

a second metal layer extending from the mid-portion of the microbridge to a second antenna contact pad and overlapping a portion of the first metal layer; and

a second dielectric layer disposed over the first metal layer and a second metal layer.

2. The system of claim 1, wherein the sensor is a thermoelectric MEMS microbridge sensor.

3. The system of claim 1, wherein the terahertz radiation source comprises a blackbody radiation source.

4. The system of claim 1, wherein at least one size dimension of the micro antenna at least partially determines a wavelength to which the microbridge sensor is sensitive.

5. The system of claim 1, further comprising a lens for focusing radiation dispersed according to wavelength from the dispersive element to the one or more detectors.

6. The system of claim 5, wherein the fore-optics, the secondary optics, and the lens comprise distinct sets of optics.

7. The system of claim 1, further comprising:

processing electronics connected to the one or more detectors; and

wherein the processing electronics is for receiving THz detection signals from the plurality of detectors and portraying information from the signals as absorbance versus frequency data.

8. The system of claim 7, wherein the processing electronics is further for identifying a material that has properties which correlate with the absorbance versus frequency data.

9. The system of claim 1, wherein the non-imaging dispersive spectrometer system is configured to provide a spectrum of a gas over a range of frequencies.

10. The system of claim 1, wherein the THz radiation ranges from about 0.1 THz to about 10 THz.