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Terahertz dispersive spectrometer system

  • US 8,981,296 B2
  • Filed: 02/06/2012
  • Issued: 03/17/2015
  • Est. Priority Date: 11/06/2007
  • Status: Active Grant
First Claim
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1. A non-imaging dispersive spectrometer system comprising:

  • a terahertz radiation source for illuminating a target;

    a slit aperture;

    fore-optics configured to focus incident radiation reflected or emanated from the target to the slit aperturea dispersive element;

    secondary optics configured to collimate the radiation from the slit aperture to the dispersive element; and

    one or more thermoelectric terahertz detectors in an optical path from the dispersive element, the one or more detectors each comprising an uncooled, thermally isolated sensor and a micro antenna connected to the uncooled sensor;

    wherein the one or more detectors are arranged according to their optimal sensitivity in a spectral range of interest as defined by the dispersive range of the dispersive element and the one or more detectors form a linear array; and

    wherein the thermally isolated sensor of the one or more thermoelectric terahertz detectors comprises;

    a microbridge, the microbridge comprising;

    a first dielectric layer;

    a first metal layer extending from a mid-portion of the microbridge to a first antenna contact pad;

    a second metal layer extending from the mid-portion of the microbridge to a second antenna contact pad and overlapping a portion of the first metal layer; and

    a second dielectric layer disposed over the first metal layer and a second metal layer.

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