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Patterned substrate design for layer growth

  • US 8,981,403 B2
  • Filed: 09/06/2012
  • Issued: 03/17/2015
  • Est. Priority Date: 09/06/2011
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a substrate comprising a patterned surface, wherein the patterned surface includes a set of substantially flat top surfaces and a plurality of openings, wherein each substantially flat top surface has a root mean square roughness less than approximately 0.5 nanometers, wherein the plurality of openings have a characteristic size between approximately 0.1 micron and five microns, wherein the substrate is an at least partially transparent layer, and wherein the substrate includes an outer surface having a profiled surface, the profiled surface including;

    a set of large roughness components providing a first variation of the profiled surface having a characteristic scale approximately an order of magnitude larger than a target wavelength of the radiation; and

    a set of small roughness components providing a second variation of the profiled surface having a characteristic scale on the order of the target wavelength of the radiation, wherein the set of small roughness components are superimposed on the set of large roughness components.

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