Patterned substrate design for layer growth

• US 8,981,403 B2
• Filed: 09/06/2012
• Issued: 03/17/2015
• Est. Priority Date: 09/06/2011
• Status: Active Grant

• Current Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Original Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Inventors: Shatalov, Maxim S, Jain, Rakesh, Yang, Jinwei, Shur, Michael, Gaska, Remigijus
• Primary Examiner(s): Lee, Kyoung
• Assistant Examiner(s): Mehta, Ratisha
• Application Number:
  US13/605,007
• Publication Number:
  US 20130056770A1
• Time in Patent Office: 922 Days
• Field of Search: 257/98, 257/730, 257/88, 257/89, 257/99, 257/94, 257/95, 257/E21.121, 257/E21.126, 257/E21.127, 438/29
• US Class Current: 257/98
• CPC Class Codes: H01L 21/0237 Materials
• CPC Class Codes: H01L 21/0242 Crystalline insulating materials
• CPC Class Codes: H01L 21/0243 Surface structure
• CPC Class Codes: H01L 21/02458 Nitrides
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/02639 Preparation of substrate for selective deposition
• CPC Class Codes: H01L 21/0265 Pendeoepitaxy
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 33/22 Roughened surfaces, e.g. at the interface between epitaxial layers
• CPC Class Codes: Y02W 10/37 using solar energy

Abstract

A patterned surface for improving the growth of semiconductor layers, such as group III nitride-based semiconductor layers, is provided. The patterned surface can include a set of substantially flat top surfaces and a plurality of openings. Each substantially flat top surface can have a root mean square roughness less than approximately 0.5 nanometers, and the openings can have a characteristic size between approximately 0.1 micron and five microns.

Claims

1. A device comprising:

a substrate comprising a patterned surface, wherein the patterned surface includes a set of substantially flat top surfaces and a plurality of openings, wherein each substantially flat top surface has a root mean square roughness less than approximately 0.5 nanometers, wherein the plurality of openings have a characteristic size between approximately 0.1 micron and five microns, wherein the substrate is an at least partially transparent layer, and wherein the substrate includes an outer surface having a profiled surface, the profiled surface including;

a set of large roughness components providing a first variation of the profiled surface having a characteristic scale approximately an order of magnitude larger than a target wavelength of the radiation; and

a set of small roughness components providing a second variation of the profiled surface having a characteristic scale on the order of the target wavelength of the radiation, wherein the set of small roughness components are superimposed on the set of large roughness components.

2. The device of claim 1, wherein the patterned surface is formed from a plurality of protruding regions, each protruding region having one of the set of substantially flat top surfaces, wherein an opening between two adjacent protruding regions has a diameter less than or equal to a diameter of each of the top surfaces of the two adjacent protruding regions.

3. The device of claim 1, wherein the substrate is formed of sapphire.

4. The device of claim 1, wherein the substrate is formed of one of:

silicon, germanium, silicon carbide, a group III-nitride, or lithium gallate.

5. The device of claim 1, further comprising a group III-nitride layer formed directly on the patterned surface of the substrate.

6. The device of claim 1, wherein the substrate further comprises a plurality of silicon dioxide stripes.

7. The device of claim 1, wherein the device is configured to operate as one of:

a light emitting diode, a laser diode, or a super-luminescent light emitting diode.

8. A method comprising:

obtaining a substrate of a device having a patterned surface, wherein the patterned surface includes a set of substantially flat top surfaces and a plurality of openings, wherein each substantially flat top surface has a root mean square roughness less than approximately 0.5 nanometers, wherein the plurality of openings have a characteristic size between approximately 0.1 micron and five microns, wherein the substrate is an at least partially transparent layer; and

forming a profiled surface on an outer surface of the substrate, the profiled surface including;

a set of large roughness components providing a first non-uniform variation of the profiled surface having a characteristic scale approximately an order of magnitude larger than a target wavelength of the radiation; and

a set of small roughness components providing a second non-uniform variation of the profiled surface having a characteristic scale on the order of the target wavelength of the radiation, wherein the set of small roughness components are superimposed on the set of large roughness components.

9. The method of claim 8, further comprising fabricating the device including the substrate.

10. The method of claim 8, wherein the obtaining includes fabricating the patterned surface.

11. The method of claim 9, wherein the fabricating includes growing a group III-nitride layer directly on the patterned surface of the substrate.

12. The method of claim 11, wherein the growing uses an epitaxial process favoring lateral growth of the layer.

13. The method of claim 11, wherein the epitaxial process includes a material deposition process selected from the group consisting of:

metal organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), hydride vapor phase epitaxy (HVPE), or a modified version of any of MOCVD, MBE, or HVPE.

14. The method of claim 11, wherein the growing is performed at a temperature between approximately 400 degrees Celsius and approximately 1500 degrees Celsius.

15. The method of claim 11, wherein the growing is performed at a pressure between approximately 1×

10<sup>−

5</sup> Torr and approximately 1000 Torr.

16. The method of claim 11, wherein the growing uses a flux ratio between nitrogen and the group III elements in the growth chamber between approximately 1 and approximately 10000.

20. The method of claim 8, wherein the patterned surface is formed from a plurality of protruding regions, each protruding region having one of the set of substantially flat top surfaces, wherein an opening between two adjacent protruding regions has a diameter less than or equal to a diameter of each of the top surfaces of the two adjacent protruding regions.

17. A system comprising:

a computer system configured to implement a method of fabricating a device, the method comprising;

fabricating a patterned surface for a substrate of the device, wherein the patterned surface includes a set of substantially flat top surfaces and a plurality of openings, wherein each substantially flat top surface has a root mean square roughness less than approximately 0.5 nanometers, and wherein the plurality of openings have a characteristic size between approximately 0.1 micron and five microns;

forming a profiled surface on an outer surface of the substrate, the profiled surface including;

a set of large roughness components providing a first non-uniform variation of the profiled surface having a characteristic scale approximately an order of magnitude larger than a target wavelength of the radiation; and

a set of small roughness components providing a second non-uniform variation of the profiled surface having a characteristic scale on the order of the target wavelength of the radiation, wherein the set of small roughness components are superimposed on the set of large roughness components; and

growing a group III-nitride layer directly on the patterned surface of the substrate.

18. The system of claim 17, wherein the growing uses an epitaxial process favoring lateral growth of the layer.

19. The system of claim 17, wherein the patterned surface is formed from a plurality of protruding regions, each protruding region having one of the set of substantially flat top surfaces, wherein an opening between two adjacent protruding regions has a diameter less than or equal to a diameter of each of the top surfaces of the two adjacent protruding regions.