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Tunable MEMS resonators

  • US 8,981,875 B2
  • Filed: 01/28/2013
  • Issued: 03/17/2015
  • Est. Priority Date: 06/19/2009
  • Status: Active Grant
First Claim
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1. A resonator, comprising:

  • a cavity;

    a post extending into the cavity;

    a movable plate located within the cavity and spaced apart from the post;

    a metal layer disposed on a surface of the post facing the movable plate, wherein a variable capacitor is formed between the movable plate and the metal layer;

    a first dielectric layer located between the movable plate and the metal layer;

    a biasing electrode located on the opposite side of the movable plate as the post; and

    a second dielectric layer located between the movable plate and the biasing electrode, wherein application of a voltage to the biasing electrode causes movement of the movable plate towards the biasing electrode.

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