Tunable MEMS resonators

• US 8,981,875 B2
• Filed: 01/28/2013
• Issued: 03/17/2015
• Est. Priority Date: 06/19/2009
• Status: Active Grant

• Current Assignee: Qualcomm, Inc.
• Original Assignee: Qualcomm, Inc.
• Inventors: Park, Sang-June
• Primary Examiner(s): Summons, Barbara
• Application Number:
  US13/751,455
• Publication Number:
  US 20140009249A1
• Time in Patent Office: 778 Days
• Field of Search: 333186-188, 333/207, 333/209, 333/223, 333/224, 333231-233, 333/132, 331/107.DP, 331/116.M, 331/154
• US Class Current: 333/186
• CPC Class Codes: E05Y 2900/402 for cantilever gates
• CPC Class Codes: H01P 1/127 Strip line switches
• CPC Class Codes: H01P 1/2084 with dielectric resonators
• CPC Class Codes: H03H 9/02244 of microelectro-mechanical resonators
• CPC Class Codes: H03H 9/462 Microelectro-mechanical filters

Abstract

Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable layer located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.

Claims

1. A resonator, comprising:

a cavity;

a post extending into the cavity;

a movable plate located within the cavity and spaced apart from the post;

a metal layer disposed on a surface of the post facing the movable plate, wherein a variable capacitor is formed between the movable plate and the metal layer;

a first dielectric layer located between the movable plate and the metal layer;

a biasing electrode located on the opposite side of the movable plate as the post; and

a second dielectric layer located between the movable plate and the biasing electrode, wherein application of a voltage to the biasing electrode causes movement of the movable plate towards the biasing electrode.

2. The resonator of claim 1, wherein application of the voltage to the biasing electrode increases a resonance frequency of the resonator.

3. The resonator of claim 1, wherein the first dielectric layer is located on a surface of the movable plate facing the post.

4. The resonator of claim 1, wherein the first dielectric layer is located on a surface of the metal layer facing the movable plate.

5. The resonator of claim 1, additionally including a second metal layer located on the same side of the second dielectric layer as the movable plate, wherein the movable plate is not coplanar with the second metal layer when no voltage is applied to the biasing electrode.

6. The resonator of claim 1, wherein the movable plate is supported on one side by an anchor, and wherein the movable plate is operated as a cantilever.

7. The resonator of claim 1, wherein the movable plate is supported on a first side by a first anchor and on a second side by a second anchor, and wherein the movable plate is operated as a bridge.

8. The resonator of claim 1, additionally including at least a second post extending into the cavity.

9. The resonator of claim 1, additionally including at least a second movable plate located within the cavity and spaced apart from the post.

10. A device including at least one resonator, each resonator comprising:

a cavity;

a post extending into the cavity;

a movable plate located within the cavity and spaced apart from the post, wherein the movable plate is supported on one side by an anchor, and wherein the movable plate is operated as a cantilever;

a biasing electrode located on the opposite side of the movable plate as the post; and

a dielectric layer located between the movable plate and the biasing electrode, wherein application of a voltage to the biasing electrode causes movement of the movable plate towards the biasing electrode to alter a resonance frequency of the resonator.

11. The device of claim 10, wherein the device includes a filter including the at least one resonator and configured to receive an input signal and provide an output signal, and wherein the filter has a tunable frequency response based on the resonance frequency of each of the at least one resonator.

12. The device of claim 11, wherein the device is a wireless communication device, and wherein the filter is used in a transmitter or a receiver of the wireless communication device to pass a desired signal or to attenuate undesired signals and noise.

13. The device of claim 10, wherein the device includes an oscillator, the oscillator including the at least one resonator and an amplifier coupled to the at least one resonator to provide amplification for an oscillator signal, wherein the oscillator has a tunable oscillation frequency determined based on the resonance frequency of each resonator.

14. The device of claim 13, wherein:

the amplifier includes;

a first transistor providing amplification for a non-inverting signal of the oscillator signal; and

a second transistor providing amplification for an inverting signal of the oscillator signal; and

the at least one resonator includes;

a first MEMS resonator coupled to the first transistor; and

a second MEMS resonator coupled to the second transistor.

15. The device of claim 13, wherein the device is a wireless communication device, and wherein the oscillator signal is used to generate a local oscillator signal for a transmitter or a receiver in the wireless communication device.

16. A method comprising:

applying a voltage to a biasing electrode of a resonator, the resonator including a post extending into a cavity, a movable plate located in the cavity and between the post and the biasing electrode, a metal layer on a surface of a post facing the movable plate, and a dielectric layer between the metal layer and the movable plate, wherein applying the voltage to the biasing electrode causes movement of the movable plate towards the biasing electrode to vary a resonance frequency of the resonator; and

receiving a radio frequency signal from the cavity of the resonator.

17. The method of claim 16, wherein applying a voltage includes applying a voltage which moves the movable plate against a second dielectric layer located between the movable plate and the biasing electrode to obtain a maximum resonance frequency for the resonator.

18. The method of claim 16, wherein applying a voltage includes applying a voltage between a first voltage and a second voltage, the first voltage corresponding to a maximum resonance frequency for the resonator, and the second voltage corresponding to a minimum resonance frequency for the resonator.