Piezoelectric resonator structures and electrical filters having frame elements
First Claim
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1. An electrical resonator, comprising:
- a first electrode having a plurality of sides;
a second electrode having the plurality of sides;
a piezoelectric element disposed between the first and second electrodes; and
at least one raised frame element disposed between the first electrode and the second electrode and along a corresponding at least one side but not all sides of the first electrode.
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Abstract
Film bulk acoustic resonators (FBARs) having frame elements and filters including the resonators are described.
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Citations
22 Claims
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1. An electrical resonator, comprising:
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a first electrode having a plurality of sides; a second electrode having the plurality of sides; a piezoelectric element disposed between the first and second electrodes; and at least one raised frame element disposed between the first electrode and the second electrode and along a corresponding at least one side but not all sides of the first electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An electrical filter, comprising:
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one or more electrical resonators, each of which comprises; a first electrode having a plurality of sides; a second electrode having the plurality of sides; a piezoelectric element disposed between the first and second electrodes; and at least one raised frame element disposed between the first electrode and the second electrode and along a corresponding at least one side but not all sides of the first electrode. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification