Defect estimation device and method and inspection system and method
First Claim
1. An inspection device, which irradiates light to a sample formed with a pattern, forming an image of the sample on an image sensor through an optical system, and determines the presence of a defect, comprising:
- an optical image acquisition part which obtains an optical image of the sample from the image sensor;
a first comparison part which compares the optical image with a reference image as a reference of the determination and, when a difference exceeds at least one of threshold values, determines that there is a defect;
a transfer image estimation part which estimates by simulation an optical image obtained when each pattern of an optical image on the sample and the reference image is transferred by a transfer device; and
a second comparison part which compares each of the transfer images and when a difference exceeds at least one of the threshold values, determines that there is a defect.
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Accused Products
Abstract
Acquired mask data of a defect portion is sent to a simulated repair circuit 300 to be simulated. The simulation of the acquired mask data 204 is returned to the mask inspection results 205 and thereafter sent to a wafer transfer simulator 400 along with a reference image at the corresponding portion. A wafer transfer image estimated by the wafer transfer simulator 400 is sent to a comparing circuit 301. When it is determined that there is a defect in the comparing circuit 301, the coordinates and the wafer transfer image which is a basis for the defect determination are stored as transfer image inspection results 206. The mask inspection results 205 and the transfer image inspection result 206 are then sent to the review device 500.
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Citations
10 Claims
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1. An inspection device, which irradiates light to a sample formed with a pattern, forming an image of the sample on an image sensor through an optical system, and determines the presence of a defect, comprising:
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an optical image acquisition part which obtains an optical image of the sample from the image sensor; a first comparison part which compares the optical image with a reference image as a reference of the determination and, when a difference exceeds at least one of threshold values, determines that there is a defect; a transfer image estimation part which estimates by simulation an optical image obtained when each pattern of an optical image on the sample and the reference image is transferred by a transfer device; and a second comparison part which compares each of the transfer images and when a difference exceeds at least one of the threshold values, determines that there is a defect. - View Dependent Claims (2, 3)
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4. An inspection method, which irradiates light to a sample formed with a pattern, forming an image of the sample on an image sensor through an optical system, and determines the presence of a defect, characterized by comprising:
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obtaining an optical image of the sample from the image sensor; comparing the optical image with a reference image as a reference of the determination and, when a difference exceeds at least one of threshold values, determining that there is a defect; estimating a transfer image of the optical image and a transfer image of the reference image by simulation; comparing the transfer image of the optical image and the transfer image of the reference image and when a difference exceeds at least one of the threshold values, determining that there is a defect; and reviewing the optical image, the reference image and each of the transfer images and determining necessity of repair to be applied to the defect. - View Dependent Claims (5, 6, 7)
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8. An inspection device, which irradiates light to a sample formed with a pattern, forming an image of the sample on an image sensor through an optical system and determines the presence of a defect, characterized by comprising:
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an optical image acquisition part which obtains an optical image of the sample from the image sensor; a first comparison part which compares the optical image with a reference image as a reference of the determination and when a difference exceeds at least one of threshold values, determines that there is a defect; a simulated repair part which obtains the optical image determined as defective by the first comparison part and simulates a repair to the defect; a transfer image estimation part which estimates a transfer image of the optical image simulated by the simulated repair part and a transfer image of the reference image by simulation; and a second comparison part which compares each of the transfer images and when a difference exceeds at least one of the threshold values, determines that there is a defect. - View Dependent Claims (9, 10)
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Specification