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Defect estimation device and method and inspection system and method

  • US 8,983,113 B2
  • Filed: 12/05/2012
  • Issued: 03/17/2015
  • Est. Priority Date: 02/01/2010
  • Status: Active Grant
First Claim
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1. An inspection device, which irradiates light to a sample formed with a pattern, forming an image of the sample on an image sensor through an optical system, and determines the presence of a defect, comprising:

  • an optical image acquisition part which obtains an optical image of the sample from the image sensor;

    a first comparison part which compares the optical image with a reference image as a reference of the determination and, when a difference exceeds at least one of threshold values, determines that there is a defect;

    a transfer image estimation part which estimates by simulation an optical image obtained when each pattern of an optical image on the sample and the reference image is transferred by a transfer device; and

    a second comparison part which compares each of the transfer images and when a difference exceeds at least one of the threshold values, determines that there is a defect.

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