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Tethered, levitated-mass accelerometer

  • US 8,984,941 B2
  • Filed: 12/16/2010
  • Issued: 03/24/2015
  • Est. Priority Date: 12/16/2009
  • Status: Active Grant
First Claim
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1. A multi-axis force-balance accelerometer including 3 rectilinear reference axes X, Y and Z and 3 angular reference axes θ

  • , Φ

    , and Ψ

    , the accelerometer comprising;

    a) an enclosure having a null position in each of said 3 rectilinear reference axes and in each of said 3 angular reference axes,b) a proof mass included inside said enclosure and movable relative to each of said 3 rectilinear reference axes and each of said 3 angular reference axes,c) at least one electrically conductive tether which is flexible in 6 degrees of freedom constituting an electrically conductive link between said proof mass and said enclosure, andd) mechanical stops for limiting a range of motion of said proof mass from said null position,said enclosure including a plurality of capacitive plates for sensing the position of said proof mass relative to the null position in each of said 3 rectilinear reference axes and in each of said 3 angular reference axes and for applying electrostatic forces on said proof mass along each of said 3 rectilinear reference axes and for applying electrostatic torques on said proof mass around each of said 3 angular reference axes,said accelerometer including 3 force balancing control loops for positioning said proof mass in said null position for each of said 3 rectilinear reference axes, and 3 force balancing control loops for positioning said proof mass in said null position for each of said 3 angular reference axes,and wherein said electrically conductive tether is mechanically compliant such that, on deactivation of said force balancing control loops for said 3 rectilinear reference axes, said proof mass falls so as to rest on said mechanical stops.

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