Tethered, levitated-mass accelerometer

• US 8,984,941 B2
• Filed: 12/16/2010
• Issued: 03/24/2015
• Est. Priority Date: 12/16/2009
• Status: Active Grant

• Current Assignee: Y-Sensors, Ltd.
• Original Assignee: Y-Sensors, Ltd.
• Inventors: Netzer, Yishay, Aharon, Oren, Girgel, Michael
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US13/515,292
• Publication Number:
  US 20120240679A1
• Time in Patent Office: 1,559 Days
• Field of Search: 735/143.2, 735/141.7, 735/141.8, 735/143.8, 735/10, 735/11
• US Class Current: 73/514.18
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 15/18 in two or more dimensions

Abstract

A multi-axis force-balance accelerometer has a proof mass included within an enclosure. An electrically conductive tether, flexible in 6 degrees of freedom, provides a compliant electrically conductive link between the proof mass and the enclosure. Mechanical stops limit a range of motion of the proof mass. The enclosure includes captive plates and force balancing control loops for positioning the proof mass in a null position within the enclosure for each of the 3 rectilinear reference axes, and in a null position within the enclosure for each of 3 angular reference axes. The electrically conductive tether is sufficiently mechanically compliant that, on deactivation of the force balancing control loops for the rectilinear axes, the proof mass falls so as to rest on the mechanical stops.

Claims

1. A multi-axis force-balance accelerometer including 3 rectilinear reference axes X, Y and Z and 3 angular reference axes θ

, Φ

, and Ψ

, the accelerometer comprising;

a) an enclosure having a null position in each of said 3 rectilinear reference axes and in each of said 3 angular reference axes,

b) a proof mass included inside said enclosure and movable relative to each of said 3 rectilinear reference axes and each of said 3 angular reference axes,

c) at least one electrically conductive tether which is flexible in 6 degrees of freedom constituting an electrically conductive link between said proof mass and said enclosure, and

d) mechanical stops for limiting a range of motion of said proof mass from said null position,

said enclosure including a plurality of capacitive plates for sensing the position of said proof mass relative to the null position in each of said 3 rectilinear reference axes and in each of said 3 angular reference axes and for applying electrostatic forces on said proof mass along each of said 3 rectilinear reference axes and for applying electrostatic torques on said proof mass around each of said 3 angular reference axes,

said accelerometer including 3 force balancing control loops for positioning said proof mass in said null position for each of said 3 rectilinear reference axes, and 3 force balancing control loops for positioning said proof mass in said null position for each of said 3 angular reference axes,

and wherein said electrically conductive tether is mechanically compliant such that, on deactivation of said force balancing control loops for said 3 rectilinear reference axes, said proof mass falls so as to rest on said mechanical stops.

2. An accelerometer as in claim 1 wherein said tether includes at least one spiral.

3. A planar accelerometer as in claim 1 fabricated using micromechanical technologies and comprising:

a) a top layer;

b) an intermediate device layer; and

c) a bottom layer,

said top and bottom layers being spaced apart to constitute at least part of said enclosure, said proof mass and said tether being fabricated by etching the device layer, the inner surfaces of said bottom and top layers include a plurality of capacitive plates employed for sensing a position of the proof mass within said enclosure,

wherein a first end of said tether extends from the proof mass and a second end of the tether extends from at least one of said top and bottom layers.

4. An accelerometer as in claim 3 wherein the capacitive plates that serve the X and Y and θ

axes are capacitive (electrostatic) comb drives formed within said intermediate device layer.

5. An accelerometer as in claim 1 wherein the flexible tether includes at least one serpentine member.

6. An accelerometer as in claim 1 wherein the flexible tether is the sole mechanical connection between said proof mass and said enclosure when said proof mass is at said null position, and wherein the flexible tether is attached to said enclosure at only one region of attachment.