Tethered, levitated-mass accelerometer
First Claim
1. A multi-axis force-balance accelerometer including 3 rectilinear reference axes X, Y and Z and 3 angular reference axes θ
- , Φ
, and Ψ
, the accelerometer comprising;
a) an enclosure having a null position in each of said 3 rectilinear reference axes and in each of said 3 angular reference axes,b) a proof mass included inside said enclosure and movable relative to each of said 3 rectilinear reference axes and each of said 3 angular reference axes,c) at least one electrically conductive tether which is flexible in 6 degrees of freedom constituting an electrically conductive link between said proof mass and said enclosure, andd) mechanical stops for limiting a range of motion of said proof mass from said null position,said enclosure including a plurality of capacitive plates for sensing the position of said proof mass relative to the null position in each of said 3 rectilinear reference axes and in each of said 3 angular reference axes and for applying electrostatic forces on said proof mass along each of said 3 rectilinear reference axes and for applying electrostatic torques on said proof mass around each of said 3 angular reference axes,said accelerometer including 3 force balancing control loops for positioning said proof mass in said null position for each of said 3 rectilinear reference axes, and 3 force balancing control loops for positioning said proof mass in said null position for each of said 3 angular reference axes,and wherein said electrically conductive tether is mechanically compliant such that, on deactivation of said force balancing control loops for said 3 rectilinear reference axes, said proof mass falls so as to rest on said mechanical stops.
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Accused Products
Abstract
A multi-axis force-balance accelerometer has a proof mass included within an enclosure. An electrically conductive tether, flexible in 6 degrees of freedom, provides a compliant electrically conductive link between the proof mass and the enclosure. Mechanical stops limit a range of motion of the proof mass. The enclosure includes captive plates and force balancing control loops for positioning the proof mass in a null position within the enclosure for each of the 3 rectilinear reference axes, and in a null position within the enclosure for each of 3 angular reference axes. The electrically conductive tether is sufficiently mechanically compliant that, on deactivation of the force balancing control loops for the rectilinear axes, the proof mass falls so as to rest on the mechanical stops.
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Citations
6 Claims
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1. A multi-axis force-balance accelerometer including 3 rectilinear reference axes X, Y and Z and 3 angular reference axes θ
- , Φ
, and Ψ
, the accelerometer comprising;a) an enclosure having a null position in each of said 3 rectilinear reference axes and in each of said 3 angular reference axes, b) a proof mass included inside said enclosure and movable relative to each of said 3 rectilinear reference axes and each of said 3 angular reference axes, c) at least one electrically conductive tether which is flexible in 6 degrees of freedom constituting an electrically conductive link between said proof mass and said enclosure, and d) mechanical stops for limiting a range of motion of said proof mass from said null position, said enclosure including a plurality of capacitive plates for sensing the position of said proof mass relative to the null position in each of said 3 rectilinear reference axes and in each of said 3 angular reference axes and for applying electrostatic forces on said proof mass along each of said 3 rectilinear reference axes and for applying electrostatic torques on said proof mass around each of said 3 angular reference axes, said accelerometer including 3 force balancing control loops for positioning said proof mass in said null position for each of said 3 rectilinear reference axes, and 3 force balancing control loops for positioning said proof mass in said null position for each of said 3 angular reference axes, and wherein said electrically conductive tether is mechanically compliant such that, on deactivation of said force balancing control loops for said 3 rectilinear reference axes, said proof mass falls so as to rest on said mechanical stops. - View Dependent Claims (2, 3, 4, 5, 6)
- , Φ
Specification