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Suspended masses in micro-mechanical devices

  • US 8,984,942 B2
  • Filed: 02/10/2012
  • Issued: 03/24/2015
  • Est. Priority Date: 02/10/2012
  • Status: Expired due to Fees
First Claim
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1. A micro-mechanical device comprising:

  • a substrate comprising an internal cavity, a first surface, and an opposing second surface;

    a first trench formed through the first surface of the substrate into the internal cavity, the first trench at least partially defining flexures; and

    a second trench formed through the second surface of the substrate into the internal cavity, the second trench at least partially defining a suspended mass, in which the suspended mass is connected by the flexures to the substrate, in which the flexures are sandwiched between sides of the suspended mass and the surrounding substrate;

    in which the second trench is narrower than the first trench such that under acceleration the second trench closes before the first trench and limits motion of the suspended mass.

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