Capacitive pressure sensor
First Claim
1. A pressure sensor, comprising:
- a tubular probe body having a proximal end and a distal end;
a capacitive sensor disposed at the distal end of the probe body;
a lead electrically coupled to the capacitive sensor and extending along an interior space of the tubular probe body toward the proximal end; and
at least one support formed of a material having a relatively low dielectric constant and disposed within the tubular probe body, the at least one support constructed and arranged to support the lead within the tubular probe body and space the lead away from an inner wall of the tubular probe body.
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Accused Products
Abstract
Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor may include: a tubular probe body; a capacitive sensor disposed at the distal end of the probe body; a lead electrically coupled to the sensor extending along an interior space of the probe body; and at least one support formed of a material having a relatively low dielectric constant disposed within the probe body to support the lead and space the lead away from an inner wall of the probe body. This may help to minimize shunt capacitance and changes in shunt capacitance due to radial movement of the lead. In other embodiments, a pressure sensor may include a channel formed in a wall of the probe body, a temperature sensor disposed at a distal end of the probe body, and a temperature sensor lead disposed in the channel and connected to the temperature sensor.
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Citations
23 Claims
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1. A pressure sensor, comprising:
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a tubular probe body having a proximal end and a distal end; a capacitive sensor disposed at the distal end of the probe body; a lead electrically coupled to the capacitive sensor and extending along an interior space of the tubular probe body toward the proximal end; and at least one support formed of a material having a relatively low dielectric constant and disposed within the tubular probe body, the at least one support constructed and arranged to support the lead within the tubular probe body and space the lead away from an inner wall of the tubular probe body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A pressure sensor, comprising:
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a tubular probe body having a proximal end and a distal end, the tubular probe body includes a channel formed in a wall of the tubular probe body and extending from the distal end to the proximal end; a capacitive sensor disposed at the distal end of the probe body; a lead electrically coupled to the capacitive sensor and extending along an interior space of the tubular probe body toward the proximal end; and a temperature sensor disposed at the distal end of the tubular probe body, wherein a temperature sensor lead is disposed in the channel and connected to the temperature sensor. - View Dependent Claims (20, 21, 22, 23)
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Specification