Method and apparatus for depositing LED organic film

• US 8,986,780 B2
• Filed: 04/15/2011
• Issued: 03/24/2015
• Est. Priority Date: 11/19/2004
• Status: Active Grant

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Bulovic, Vladimir, Baldo, Marc A., Schmidt, Martin A., Gassend, Valerie, Chen, Jianglong
• Primary Examiner(s): CHEN, BRET P
• Application Number:
  US13/088,323
• Publication Number:
  US 20120015104A1
• Time in Patent Office: 1,439 Days
• Field of Search: 427/248.1, 427/255.6, 427/162, 427/189
• US Class Current: 427/189
• CPC Class Codes: B05D 1/12 Applying particulate materials B05D1/06, B05D1/10 take precedence
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/40 Thermal treatment, e.g. annealing in the presence of a solvent vapour

Abstract

The disclosure relates to a method for depositing an organic film layer on a substrate. In one implementation a method to deposit organic film by generating vaporized organic particles; streaming a carrier fluid proximal to a source to carry the vaporized organic particles and solid organic particles from the source towards the substrate; transporting the vaporized and solid organic particles through a discharge nozzle with a plurality of micro-pore openings, placed between the source and the substrate, that permits the passage of at least a portion of the vaporized or solid organic particles through the micro-pores; depositing the vaporized organic particles and the solid organic particles that are transported through the discharge nozzle onto the substrate.

Claims

1. A method for depositing a layer of substantially solvent-free organic material on a substrate, comprising:

generating vaporized organic particles;

streaming a carrier fluid proximal to a source to carry the vaporized organic particles and solid organic particles from the source towards the substrate;

transporting the vaporized and solid organic particles through a discharge nozzle with a plurality of micro-pore openings, placed between the source and the substrate, that permits the passage of at least a portion of the vaporized or solid organic particles through the micro-pores;

depositing the vaporized organic particles and the solid organic particles that are transported through the discharge nozzle onto the substrate to form a substantially solvent-free organic layer on the substrate.

2. The method of claim 1, wherein the step of generating the vaporized organic particles further comprises heating the source of organic material.

3. The method of claim 2, wherein the source is heated to a temperature of at least about 100°

C.

4. The method of claim 1, wherein the step of streaming the carrier fluid proximal to the source further comprises heating the carrier fluid.

5. The method of claim 1, wherein transporting the organic particles through the micro-pores further comprises heating the discharge nozzle.

6. The method of claim 1, further comprising lodging and dislodging at least one solid organic particle at least one micro-pore.

7. The method of claim 1, further comprising pulsatingly heating the plurality of micro-pores to permit the passage of at least a portion of the vaporized or solid organic particles through the micro-pores.