Cap for a microelectromechanical system device with electromagnetic shielding, and method of manufacture
First Claim
1. A device, comprising:
- a first layer of polymeric material having a first face and a second face, opposite the first face;
an aperture extending through the first layer from the first face to the second face;
a second layer of polymeric material positioned on the first face of the first layer and covering the aperture to form a cavity, the cavity having side walls formed by the aperture of the first layer and a back wall formed by a surface of the second layer;
a layer of adhesive coupling the first layer and the second layer together, the layer of adhesive having a first thickness; and
an electrically continuous layer of conductive paint located in the cavity and extending on the side walls and back wall of the cavity and on the adhesive layer, the layer of conductive paint having a second thickness that is substantially smaller than the first thickness, the layer of conductive paint assisting in adhering the first layer and the second layer together.
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Accused Products
Abstract
A cap for a microelectromechanical system device includes a first layer of, e.g., Bismaleimide Triazine (BT) resin material in which a through-aperture is formed, laminated to a second layer of BT resin material that closes the aperture in the first layer, forming a cavity. The first and second layers are laminated with a thermosetting adhesive that is sufficiently thick to encapsulate particles that may remain from a routing operation for forming the apertures. The interior of the cavity, including exposed portions of the adhesive, and the exposed face of the first layer are coated with an electrically conductive paint. The cap is adhered to a substrate over the MEMS device using an electrically conductive adhesive, which couples the conductive paint layer to a ground plane of the substrate. The layer of conductive paint serves as a shield to prevent or reduce electromagnetic interference acting on the MEMS device.
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Citations
16 Claims
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1. A device, comprising:
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a first layer of polymeric material having a first face and a second face, opposite the first face; an aperture extending through the first layer from the first face to the second face; a second layer of polymeric material positioned on the first face of the first layer and covering the aperture to form a cavity, the cavity having side walls formed by the aperture of the first layer and a back wall formed by a surface of the second layer; a layer of adhesive coupling the first layer and the second layer together, the layer of adhesive having a first thickness; and an electrically continuous layer of conductive paint located in the cavity and extending on the side walls and back wall of the cavity and on the adhesive layer, the layer of conductive paint having a second thickness that is substantially smaller than the first thickness, the layer of conductive paint assisting in adhering the first layer and the second layer together. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A Method of manufacture, comprising:
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positioning a layer of adhesive on a first face of a first sheet of polymeric material, the layer of adhesive having a first thickness; forming a plurality of apertures extending through the first sheet of polymeric material and through the layer of adhesive; positioning a second sheet of polymeric material on the first face of the first sheet of polymeric material in contact with the layer of adhesive, closing one side of the plurality of apertures and forming a plurality of cavities; and depositing a layer of electrically conductive paint over the second face of the first sheet of polymeric material, over side walls and end walls of the plurality of cavities, and over an exposed portion of the layer of adhesive, the layer of electrically conductive paint having a second thickness that is substantially thinner than the first thickness, the layer of electrically conductive paint assisting in adhering the first and sheets of polymeric material together. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A method, comprising:
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forming an aperture in a first sheet of polymeric material; using an adhesive layer to couple a second sheet of polymeric material to a face of the first sheet and covering one side of the aperture, thereby forming a cavity, the adhesive layer having a first thickness; and applying an electrically continuous layer of conductive paint to side and back walls of the cavity, to the adhesive layer, and to the face of the body, the layer of conductive paint having a second thickness that is substantially thinner than the first thickness of the adhesive layer, the layer of conductive paint assisting is coupling the first and second sheets of polymeric material together. - View Dependent Claims (15, 16)
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Specification