Method for providing electrical connections to spaced conductive lines
First Claim
1. An integrated circuit structure comprising:
- a plurality of linearly extending material stack lines each comprising a polysilicon material, a metal silicide material, and an oxide top material, the material stack lines formed as part of the integrated circuit and each having an angled end face at a different location along the linearly extending direction of the material stack lines; and
a contact landing pad formed in electrical contact with each angled end face.
7 Assignments
0 Petitions
Accused Products
Abstract
An integrated circuit and a method of formation provide a contact area formed at an angled end of at least one linearly extending conductive line. In an embodiment, conductive lines with contact landing pads are formed by patterning lines in a mask material, cutting at least one of the material lines to form an angle relative to the extending direction of the material lines, forming extensions from the angled end faces of the mask material, and patterning an underlying conductor by etching using said material lines and extension as a mask. In another embodiment, at least one conductive line is cut at an angle relative to the extending direction of the conductive line to produce an angled end face, and an electrical contact landing pad is formed in contact with the angled end face.
12 Citations
20 Claims
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1. An integrated circuit structure comprising:
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a plurality of linearly extending material stack lines each comprising a polysilicon material, a metal silicide material, and an oxide top material, the material stack lines formed as part of the integrated circuit and each having an angled end face at a different location along the linearly extending direction of the material stack lines; and a contact landing pad formed in electrical contact with each angled end face. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An integrated circuit structure comprising:
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a plurality of linearly extending block copolymer cylinders formed as part of the integrated circuit structure and each having an angled end face at a different location along the linearly extending direction of the block copolymer cylinders; and a contact landing pad formed in contact with each angled end face. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification