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Method, apparatus, and article to facilitate evaluation of objects using electromagnetic energy

  • US 8,988,666 B2
  • Filed: 02/04/2013
  • Issued: 03/24/2015
  • Est. Priority Date: 07/31/2006
  • Status: Active Grant
First Claim
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1. A method of facilitating the manufacturing of objects, the method comprising:

  • during a first period, sequentially illuminating at least a first portion of an object being manufactured with a plurality of bands of electromagnetic energy in a first sequence;

    during the first period, measuring a plurality of responses to the illumination from at least the first portion of the object being manufactured;

    comparing the measured responses of the first period to a first set of reference responses to illumination of a reference specimen of a reference object;

    during a second period, sequentially illuminating at least the first portion of the object being manufactured with a plurality of bands of electromagnetic energy in a second sequence, the second sequence being different than the first sequence;

    during the second period, measuring a plurality of responses to the illumination in the second sequence from at least the first portion of the object being manufactured;

    comparing the measured responses of the second period to a second set of reference responses to illumination of the reference specimen of the reference object; and

    terminating the manufacturing process of the object being manufactured based at least in part on the comparison of the measured responses of the first period to the first set of reference responses and the comparison of the measured responses of the second period to the second set of reference responses.

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