Optical phased arrays with evanescently-coupled antennas

• US 8,988,754 B2
• Filed: 01/07/2014
• Issued: 03/24/2015
• Est. Priority Date: 01/08/2013
• Status: Active Grant

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Sun, Jie, Watts, Michael R., Yaacobi, Ami, Timurdogan, Erman
• Primary Examiner(s): Jordan, Andrew
• Application Number:
  US14/149,099
• Publication Number:
  US 20140192394A1
• Time in Patent Office: 441 Days
• Field of Search: None
• US Class Current: 359/238
• CPC Class Codes: G02B 6/12033 characterised by means for configuring the device, e.g. moveable element for wavelength tuning switching G02B6/35; thermo-optic devices G02F1/0147
• CPC Class Codes: G02B 6/26 Optical coupling means G02B6/36, G02B6/42 take precedence
• CPC Class Codes: G02B 6/29343 Cascade of loop resonators
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3576 Temperature or heat actuation thermal forces controlling reflecting elements in general G02B26/0866; thermo-optic devices G02F1/0147
• CPC Class Codes: G02F 1/0147 based on thermo-optic effects G02F1/132 takes precedence
• CPC Class Codes: G02F 1/218 using semi-conducting materials
• CPC Class Codes: G02F 1/2955 by controlled diffraction or phased-array beam steering controlled diffraction for optical waveguide switching G02F1/313

Abstract

An optical phased array formed of a large number of nanophotonic antenna elements can be used to project complex images into the far field. These nanophotonic phased arrays, including the nanophotonic antenna elements and waveguides, can be formed on a single chip of silicon using complementary metal-oxide-semiconductor (CMOS) processes. Directional couplers evanescently couple light from the waveguides to the nanophotonic antenna elements, which emit the light as beams with phases and amplitudes selected so that the emitted beams interfere in the far field to produce the desired pattern. In some cases, each antenna in the phased array may be optically coupled to a corresponding variable delay line, such as a thermo-optically tuned waveguide or a liquid-filled cell, which can be used to vary the phase of the antenna'"'"'s output (and the resulting far-field interference pattern).

Claims

1. An optical phased array for forming a far-field radiation pattern from a coherent optical beam having a free-space wavelength λ

₀, the optical phased array comprising;

at least one waveguide to guide the coherent optical beam; and

a plurality of antenna elements, disposed in the plane of the at least one waveguide and evanescently coupled to the at least one waveguide, to emit respective portions of the coherent optical beam so as to form the far-field radiation pattern.

2. The optical phased array of claim 1, wherein the at least one waveguide comprises:

a column waveguide to guide the coherent optical beam in a first direction; and

at least one row waveguide, evanescently coupled to the column waveguide, to guide a first portion of the coherent optical beam to at least one antenna element in the plurality of antenna elements.

3. The optical phased array of claim 2, wherein the at least one row waveguide comprises:

a first row waveguide, evanescently coupled to the column waveguide via a first directional coupler having a first coupling efficiency, to guide the first portion of the coherent optical beam having a first amplitude; and

a second row waveguide, evanescently coupled to the column waveguide via a second directional coupler having a second coupling efficiency, to guide a second portion of the coherent optical beam having a second amplitude.

4. The optical phased array of claim 3, wherein the first coupling efficiency and the second coupling efficiency are selected such that the first amplitude is approximately equal to the second amplitude.

5. The optical phased array of claim 1, wherein the at least one waveguide is formed via a complementary metal-oxide-semiconductor (CMOS) process.

6. The optical phased array of claim 1, wherein the plurality of antenna elements are spaced at a pitch about equal to an integer multiple of λ

₀/2.

7. The optical phased array of claim 1, wherein the plurality of antenna elements are spaced at a pitch of less than or equal to about λ

₀/2.

8. The optical phased array of claim 1, wherein the respective portions of the coherent optical beam emitted by the plurality of antenna elements are of approximately equal amplitude.

9. The optical phased array of claim 1, further comprising:

at least one variable optical delay line, in optical communication with at least one antenna element in the plurality of antenna elements, to shift a phase of a corresponding portion of the coherent optical beam so as to vary an amplitude distribution of the far-field radiation pattern and/or to compensate for phase error in the at least one waveguide.

10. The optical phased array of claim 9, further comprising:

at least one heater, in thermal communication with the at least one variable optical delay line, to heat at least a portion of the at least one variable optical delay line so as to change the shift in phase imparted on the corresponding portion of the coherent optical beam by the at least one variable optical delay line.

11. The optical phased array of claim 10, wherein the at least one heater comprises a resistive heater formed in a doped semiconductor.

12. The optical phased array of claim 10, further comprising:

a controller, operably coupled to the at least one heater, to control a temperature of the at least one heater so as to vary the far-field radiation pattern via a change in the shift in phase imparted on the corresponding portion of the coherent optical beam by the at least one variable optical delay line.

13. The optical phased array of claim 9, further comprising:

a grating, in optical communication with the at least one variable optical delay line, to diffract at least part of the corresponding portion of the coherent optical beam so as to form the far-field radiation pattern.

14. The optical phased array of claim 13, wherein the grating has a full-width, half-maximum diffraction bandwidth of at least about 100 nm.

15. The optical phased array of claim 13, wherein the grating is configured to suppress resonant back-reflection of the corresponding respective portion of the coherent optical beam.

16. A method of creating a far-field radiation pattern in the far field of an optical phased array from a coherent optical beam having a free-space wavelength λ

₀, the optical phased array comprising at least one waveguide and a plurality of antenna elements disposed in a plane of the at least one waveguide, the method comprising;

(A) guiding the coherent optical beam via the at least one waveguide;

(B) evanescently coupling respective portions of the coherent optical beam from the at least one waveguide to respective antenna elements in the plurality of antenna elements; and

(C) emitting the respective portions of the coherent optical beam from the respective antenna elements so as to produce the far-field radiation pattern.

17. The method of claim 16, wherein:

(A) comprises evanescently coupling a first portion of the coherent optical beam from a column waveguide to at least one row waveguide, and

(B) comprises evanescently coupling the respective portions of the coherent optical beam from the at least one row waveguide to the respective antenna elements.

18. The method of claim 17, wherein (A) comprises:

(A1) evanescently coupling the first portion of the coherent optical beam from the column waveguide to a first row waveguide via a first directional coupler having a first coupling efficiency, the first portion of the coherent optical beam having a first amplitude; and

(A2) evanescently coupling a second portion of the coherent optical beam from the column waveguide to a second row waveguide via a second directional coupler having a second coupling efficiency, the second portion of the coherent optical beam having a second amplitude and the second coupling efficiency being selected such that the second amplitude is approximately equal to the first amplitude.

19. The method of claim 16, wherein (A) comprises:

coupling the coherent optical beam from the coherent light source into a first waveguide formed via a complementary metal-oxide-semiconductor (CMOS) process.

20. The method of claim 16, wherein (B) comprises:

coupling respective portions of approximately equal amplitude from the at least one waveguide to the plurality of antenna elements.

21. The method of claim 16, wherein (C) comprises:

emitting the respective portions of the coherent optical beam from the plurality of antenna elements at a pitch about equal to an integer multiple of λ

₀/2.

22. The method of claim 16, wherein (C) comprises:

emitting the respective portions of the coherent optical beam from the plurality of antenna elements at a pitch of less than or equal to about λ

₀/2.

23. The method of claim 16, further comprising:

shifting a phase of at least one of the respective portions of the coherent optical beam with at least one optical delay line in optical communication with a first antenna element in the plurality of antenna elements so as to vary the far-field radiation pattern and/or to compensate for phase error in the at least one waveguide.

24. The method of claim 23, further comprising:

heating at least a portion of the at least one optical delay line so as to change the shift in phase imparted on the at least one of the respective portions of the coherent optical beam by the at least one optical delay line.

25. An optical phased array to form a far-field radiation pattern from a coherent optical beam having a free-space wavelength of about λ

₀, the optical phased array comprising;

a substrate;

a column waveguide, formed in or on the substrate, to guide the coherent optical beam;

a plurality of directional couplers, formed in or on the substrate, to evanescently couple respective portions of the coherent optical beam from the column waveguide so as to produce a plurality of row beams;

a plurality of row waveguides, formed in or on the substrate, each row waveguide in the plurality of row waveguides in optical communication with a corresponding directional coupler in the plurality of directional couplers, to guide the plurality of row beams;

a plurality of phase shifters, formed in or on the substrate, each phase shifter in the plurality of phase shifters evanescently coupled to a corresponding row waveguide in the plurality of row waveguides and configured to impart a corresponding phase shift to a corresponding portion of the corresponding row beam in the plurality of row beams so as to produce a corresponding phase-shifted beam;

a plurality of antenna elements, formed in or on the substrate, each antenna element in the plurality of antenna elements in optical communication with a corresponding phase shifter in the plurality of phase shifters and configured to emit the corresponding phase-shifted beam at an angle with respect to the substrate so as to form the far-field radiation pattern; and

a plurality of independently controllable heaters, each independently controllable heater in the plurality of independently controllable heaters in thermal communication with a corresponding phase shifter in the plurality of phase shifters and configured to heat the respective phase shifter so as to vary the corresponding phase shift in order to vary the far-field radiation pattern and/or to compensate for phase error in the column waveguide and/or the plurality of row waveguides.

26. The optical phased array of claim 25, wherein each directional coupler in the plurality of directional couplers has a length selected such that the row beams in the plurality of row beams have approximately equal amplitudes.

27. The optical phased array of claim 25, wherein the plurality of antenna elements comprises at least about 4096 antenna elements.