High range digital angular rate sensor based on frequency modulation

• US 8,991,247 B2
• Filed: 10/21/2011
• Issued: 03/31/2015
• Est. Priority Date: 10/21/2011
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Trusov, Alexander, Zotov, Sergei, Shkel, Andrei
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US13/279,212
• Publication Number:
  US 20130098153A1
• Time in Patent Office: 1,257 Days
• Field of Search: 735/041.2, 735/041.4, 735/041.6, 735/040.4, 735/040.2, 735/041.3
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

A digital angular rate sensor system based on frequency modulation (FM) of the rotation rate. The new approach relies on tracking of the resonant frequencies of two high-Q mechanical modes of vibration in a MEMS vibratory gyroscope to produce an inherently digital measurement of the input angular rate. The disclosed system is enabled by a combination of a MEMS vibratory high-Q gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamics effect. The FM nature of the system eliminates noise versus bandwidth and resolution versus dynamic range tradeoffs of conventional vibratory rate gyroscopes. The FM approach allows achieving superior signal-to-noise-ratio through the use of ultra-high Q (1 million) mechanical structure without limiting the measurement bandwidth. Stability of 1e-9 can be achieved in the FM system, providing a 1000 times improvement over the state-of-the-art conventional AM gyroscopes with capacitive pick-off.

Claims

1. A method for operating a Class II Coriolis Vibratory Gyroscope (CVG) comprising:

producing a frequency modulated (FM) measurement of an input rotation rate which is produced comprising the steps of;

measuring a change in a modal frequency;

or

measuring a split between two nominally matched modal frequencies,

wherein measuring the change in a modal frequency or the split between two nominally matched modal frequencies comprises performing independent frequency counting for each of at least two mechanical modes of vibration of the CVG.

2. The method of claim 1 where measuring the split between two nominally matched modal frequencies comprises computing a real time measurement of the input rotation rate as one half of the split between two instantaneous modal frequencies, which are nominally matched.

3. The method of claim 1 where producing the frequency modulated (FM) measurement of the input rotation rate comprises computing a difference between any one of two instantaneous modal frequencies and a nominal value at zero input rate of the gyroscope.

4. The method of claim 1 further comprising providing a robustness against mechanical or electro-magnetic disturbances by using FM signal architecture.

5. The method of claim 1 further comprising providing self-calibration of the FM measurement of the input rotation rate against variations in a plurality of parameters of the gyroscope.

6. The method of claim 5 wherein the variations in the plurality of parameters of the gyroscope comprise temperature variations in quality factor, resonant frequency, and input-output relationship.

7. The method of claim 1 further comprising exciting the gyroscope continuously or periodically into vibrations along an instantaneous axis of vibration using a feedback control system.

8. The method of claim 1 where measuring the split between two nominally matched modal frequencies comprises using a phase-lock loop (PLL), zero crossing frequency counter, or detection of a beat frequency between the two modal frequencies.

9. The method of claim 1 further comprising eliminating an effect of an initial mismatch between the two modal frequencies during a computation of the input rotation rate when the gyroscope comprises a known initial mismatch between the two modal frequencies.

10. The method of claim 5 further comprising using force-rebalance to identify drifts in the gyroscope parameters and improve the performance of the gyroscope.