Systems for operating multiple plasma and/or induction heating systems and related methods
First Claim
1. A system for controlling a plurality of plasma and/or induction heating processing systems, the system comprising:
- an operating unit comprising;
a display device on which a graphic user interface can be displayed, the graphic user interface having a static region and a dynamic region; and
a selection device for selecting information to be displayed in the dynamic region;
at least two power generators, each for supplying power to a plasma processing system or an induction heating processing system; and
a network that connects the operating unit to the power generators to transmit signals including control signals between the operating unit and the power generators during operation of the power generators.
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Accused Products
Abstract
In some aspects of the invention, a system for operating a plurality of plasma and/or induction heating processing systems includes an operating unit that has a display device on which a graphic user interface can be displayed, at least two power generators that supply power to a plasma process or an induction heating process, and a network that connects the operating unit to the power generators to transmit signals between the operating unit and the power generators. The graphic user interface includes a static region and a dynamic region, and a selection device for selecting information to be displayed in the dynamic region.
201 Citations
19 Claims
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1. A system for controlling a plurality of plasma and/or induction heating processing systems, the system comprising:
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an operating unit comprising; a display device on which a graphic user interface can be displayed, the graphic user interface having a static region and a dynamic region; and a selection device for selecting information to be displayed in the dynamic region; at least two power generators, each for supplying power to a plasma processing system or an induction heating processing system; and a network that connects the operating unit to the power generators to transmit signals including control signals between the operating unit and the power generators during operation of the power generators. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification