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Magnification observation device

  • US 8,994,810 B2
  • Filed: 07/27/2012
  • Issued: 03/31/2015
  • Est. Priority Date: 10/07/2011
  • Status: Active Grant
First Claim
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1. A magnification observation device, comprising:

  • an imaging part that images an observation object, to acquire imaging data of an imaging region;

    a display part that displays an image of the observation object as an observed image based on the image data acquired by the imaging part;

    a stage that has a placement surface on which the observation object is placed, and is provided relatively rotatably with respect to the imaging part around a rotational axis substantially vertical to the placement surface, and movably along first and second axes intersecting with each other within a plane substantially parallel to the placement surface;

    a rotational angle detecting part that detects a rotational angle of the stage;

    a stage driving part that moves the stage relatively with respect to the imaging part along the first and second axes;

    an instruction accepting part that accepts an instruction for a moving direction of the stage;

    a control part that provides the stage driving part with moving amounts of the stage along the first and second axes, to control movement of the stage, whereinthe first and second axes of the stage rotate around the rotational axis integrally with the stage, andthe control part is configured to control the moving amounts along the first and second axes to be provided to the stage driving part such that a moving direction of the observation object in the imaging region of the imaging part agrees with the direction accepted by the instruction accepting part, based on the rotational angle detected by the rotational angle detecting part, and wherein the imaging region of the imaging part is provided with third and fourth axes intersecting with each other, and the control part is configured to detect an angle difference between the first and second axes of the stage and the third and fourth axes of the imaging region during predetermined calibration, and the moving amounts of the stage along the first and second axes to be provided to the stage driving part is corrected based on the detected angle difference in normal time.

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