Ion implant system having grid assembly
First Claim
1. A plasma grid implantation system comprising:
- a multi-stage differentially pumped system comprising;
a plurality of stages, each with increasing level of vacuum leading to an implant stage having highest level of vacuum;
a plurality of stages each with a decreasing level of vacuum leading away from the implant stage;
a conveyor for transporting substrates to be implanted through the multi-stage differentially pumped system;
a plasma implant system positioned at the implant stage, the plasma implant system comprising;
a plasma source configured to provide plasma in a plasma region;
a first grid plate comprising a plurality of apertures configured to allow ions from the plasma region to pass therethrough, wherein the first grid plate is configured to be positively biased by a power supply;
a second grid plate comprising a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the first grid plate, wherein the second grid plate is configured to be negatively biased by a power supply;
a substrate holder configured to support a substrate in a position where the substrate is implanted with the ions subsequent to the ions passing through the second grid plate; and
,a third grid plate disposed between the second grid plate and the substrate holder, the third grid plate comprising a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the second grid plate, the third grid plate being grounded; and
,wherein the first grid plate and the second grid plates are configured to accelerate ions from the plasma, the second grid plate is configured to suppress electrons that come off the substrate, and the third grid plate is configured to function as beam defining grid.
0 Assignments
0 Petitions
Accused Products
Abstract
An ion implantation system having a grid assembly. The system includes a plasma source configured to provide plasma in a plasma region; a first grid plate having a plurality of apertures configured to allow ions from the plasma region to pass therethrough, wherein the first grid plate is configured to be biased by a power supply; a second grid plate having a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the first grid plate, wherein the second grid plate is configured to be biased by a power supply; and a substrate holder configured to support a substrate in a position where the substrate is implanted with the ions subsequent to the ions passing through the second grid plate.
-
Citations
17 Claims
-
1. A plasma grid implantation system comprising:
-
a multi-stage differentially pumped system comprising; a plurality of stages, each with increasing level of vacuum leading to an implant stage having highest level of vacuum; a plurality of stages each with a decreasing level of vacuum leading away from the implant stage; a conveyor for transporting substrates to be implanted through the multi-stage differentially pumped system; a plasma implant system positioned at the implant stage, the plasma implant system comprising; a plasma source configured to provide plasma in a plasma region; a first grid plate comprising a plurality of apertures configured to allow ions from the plasma region to pass therethrough, wherein the first grid plate is configured to be positively biased by a power supply; a second grid plate comprising a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the first grid plate, wherein the second grid plate is configured to be negatively biased by a power supply; a substrate holder configured to support a substrate in a position where the substrate is implanted with the ions subsequent to the ions passing through the second grid plate; and
,a third grid plate disposed between the second grid plate and the substrate holder, the third grid plate comprising a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the second grid plate, the third grid plate being grounded; and
,wherein the first grid plate and the second grid plates are configured to accelerate ions from the plasma, the second grid plate is configured to suppress electrons that come off the substrate, and the third grid plate is configured to function as beam defining grid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. A plasma grid implantation system comprising:
-
a multi-stage differentially pumped system comprising; a plurality of stages, each with increasing level of vacuum leading to an implant stage having highest level of vacuum; a plurality of stages each with a decreasing level of vacuum leading away from the implant stage; a conveyor for transporting substrates to be implanted through the multi-stage differentially pumped system; a plasma implant system positioned at the implant stage, the plasma implant system comprising; a plasma source configured to provide plasma; a grid assembly comprising a plurality of grid plates, wherein each grid plate comprises a plurality of apertures configured to allow ions from the plasma to pass therethrough; and
,a substrate holder configured to support a substrate in a position where the substrate is implanted with the ions subsequent to the ions passing through the plurality of apertures of the grid plates, wherein at least one of the substrate holder and the grid plates is configured to be adjusted between a homogeneous implantation position and a selective implantation position, wherein the homogeneous implantation position is configured to enable a single laterally- homogeneous ion implantation across the substrate on the substrate holder, the single laterally-homogeneous ion implantation being formed from a combination of ions that have passed through different apertures of one of the grid plates, and wherein the selective implantation position is configured to enable a plurality of laterally spaced-apart ion implantations of the substrate on the substrate holder, the plurality of laterally spaced-apart ion implantations being formed from ions that have passed through the different apertures of one of the grid plate; wherein the plurality of grid plates comprises; a positively biased first grid plate comprising a plurality of apertures configured to allow ions from the plasma in a plasma region to pass therethrough; a negatively biased second grid plate comprising a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the first grid plate; a grounded third grid plate comprising a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the second grid plate; and
,wherein the first grid plate and the second grid plates are configured to accelerate ions from the plasma, the second grid plate is configured to suppress electrons that come off the substrate, and the third grid plate is configured to function as beam defining grid. - View Dependent Claims (15, 16, 17)
-
Specification