Capillary actuator deployment

• US 8,998,514 B2
• Filed: 12/16/2013
• Issued: 04/07/2015
• Est. Priority Date: 11/15/2010
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Gutierrez, Roman C., Calvet, Robert J., Liu, Xiaolei
• Primary Examiner(s): FULLER, RODNEY EVAN
• Application Number:
  US14/108,164
• Publication Number:
  US 20140104764A1
• Time in Patent Office: 477 Days
• Field of Search: 396/529
• US Class Current: 396/529
• CPC Class Codes: F16H 21/44 for conveying or interconverting oscillating or reciprocating motions
• CPC Class Codes: G02B 27/646 compensating for small deviations, e.g. due to vibration or shake movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68
• CPC Class Codes: G02B 7/08 adapted to co-operate with a remote control mechanism
• CPC Class Codes: G02B 7/102 controlled by a microcomputer cameras with interchangeable lenses G03B17/14
• CPC Class Codes: G03B 2205/0046 Movement of one or more optical elements for zooming
• CPC Class Codes: G03B 2205/0069 using electromagnetic actuators, e.g. voice coils
• CPC Class Codes: G03B 3/10 Power-operated focusing
• CPC Class Codes: G03B 5/00 Adjustment of optical system relative to image or object surface other than for focusing
• CPC Class Codes: Y10T 156/10 Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 74/18992 Reciprocating to reciprocating

Abstract

A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced a selected distance apart from the fixed frame, and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Claims

1. A device comprising an actuator, the actuator comprising:

an outer frame;

a fixed frame attached to the outer frame;

a moveable frame disposed parallel to the fixed frame;

a motion control flexure coupling the moveable frame to the outer frame;

a hydrophilic moving plate;

an element coupled to the moveable frame for movement relative to the fixed and outer frames and movement about a central axis of the element;

wherein the moveable frame and the fixed frame are spaced a selected distance apart for substantially rectilinear movement relative to each other; and

a cured liquid adhesive attached to the hydrophilic moving plate that cooperates with the hydrophilic moving plate to space the movable frame and the fixed frame apart at the selected distance.

2. The device of claim 1, the actuator further comprising a plurality of interdigitated teeth, wherein the cured liquid adhesive is disposed between the hydrophilic moving plate and the outer frame.

3. The device of claim 2, wherein a first portion of the plurality of interdigitated teeth is attached to the fixed frame and a second portion of the plurality of interdigitated teeth is attached to the moveable frame.

4. The device of claim 3,

wherein the first portion is a fixed portion and wherein the second portion is a moving portion,

wherein the hydrophilic moving plate includes an upper portion coupled to the outer frame by an attachment spring, a lower end coupled to the motion control flexure, a side wall disposed adjacent to and spaced apart from a side wall of the outer frame, a pair of arms extending toward and defining a gap between the adjacent side walls of the moving plate and the outer frame, and a pair of registration locks disposed in the gap,

wherein the device further comprises:

a pair of parallel slots and a pair of parallel registration keys disposed in the adjacent side wall of the outer frame, each slot being configured to receive a respective one of the arms of the moving plate and each registration key being configured to engage in a respective one of the registration locks thereof; and

a serpentine reservoir for the liquid adhesive formed in the outer frame and disposed in communication with the gap between the adjacent side walls of the moving plate and the outer frame; and

,

wherein the cured liquid adhesive is disposed in the gap between the adjacent side walls of the moving plate and the outer frame.

5. The device of claim 3,

wherein the moving frame is configured to move responsive to a voltage differential on the plurality of interdigitated teeth,

wherein the hydrophilic moving plate is coupled to the motion control flexure by a deployment flexure and has a side wall disposed adjacent to a side wall of the outer frame, the adjacent side walls of the moving plate and the outer frame respectively containing complementary zigzag patterns defining a zigzag gap between the adjacent side walls of the moving plate and the outer frame;

and,

wherein the cured liquid adhesive is disposed in the zigzag gap.

6. The device of claim 1, wherein the motion control flexure couples the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and wherein the device further comprises a hydrophilic stationary plate, and wherein the cured liquid adhesive is disposed between the hydrophilic moving plate and the hydrophilic stationary plate.

7. The device of claim 1, wherein the movement of the element relative to the fixed and outer frames comprises rectilinear movement relative to the fixed and outer frames.

8. The device of claim 1, wherein the movement about the central axis of the element comprises coplanar, rotational movement about the central axis of the element.

9. The device of claim 1, wherein the device is an electronic device.

10. The device of claim 1, wherein the device is a camera.

11. A method for making a device, the method comprising:

forming a substantially planar actuator, the actuator comprising;

an outer frame;

a fixed frame attached to the outer frame; and

a moveable frame disposed parallel to the fixed frame;

coupling the moveable frame to the outer frame to provide coplanar, rectilinear movement relative to the outer frame and the fixed frame;

coupling an element to the moveable frame for coplanar, rectilinear movement relative to the fixed and outer frames and coplanar, rotational movement about a central axis of the element; and

separating, with a capillary force of a liquid adhesive, the fixed frame and the moveable frame so that the fixed frame and the movable frame are spaced apart by a selected distance.

12. The method of claim 11, wherein the separating comprises:

separating the fixed frame and the moveable frame so that the fixed frame and the movable frame are coplanar, parallel, and spaced apart by the selected distance by;

forming a moving plate having an upper portion coupled to the outer frame by an attachment spring, a lower end coupled to the motion control flexure, a side wall disposed adjacent to and spaced apart from a side wall of the outer frame, a pair of arms extending toward and defining a gap between the adjacent side walls of the moving plate and the outer frame, and a pair of registration locks disposed in the gap;

forming a pair of parallel slots and a pair of parallel registration keys in the adjacent side wall of the outer frame, each slot being configured to receive a respective one of the arms of the moving plate and each registration key being configured to engage in a respective one of the registration locks thereof;

forming a serpentine reservoir for a liquid adhesive in the outer frame and in communication with the gap between the adjacent side walls of the moving plate and the outer frame; and

,

disposing the liquid adhesive in the gap between the adjacent side walls of the moving plate and the outer frame such that the adhesive is wicked into the serpentine reservoir in the outer plate and creates the capillary force between the adjacent side walls of the moving plate and the outer frame that draws the adjacent side wall of the moving plate laterally toward the adjacent side wall of the outer frame, thereby causing the respective arms, slots, registration locks and keys of the moving plate and the outer frame to move into engagement with each other and the motion control flexure to separate the fixed frame and the moveable frame so that the fixed frame and the movable frame are coplanar, parallel, and spaced apart by the selected distance.

13. The method of claim 12, wherein the actuator further comprises a plurality of interdigitated teeth having a common length and wherein the selected distance is greater than the common length of the plurality of interdigitated teeth.

14. The method of claim 11, further comprising moving the element rectilinearly relative to the fixed and outer frames, and wherein the separating comprises:

forming a moving plate coupled to the motion control flexure by a deployment flexure and having a side wall disposed adjacent to a side wall of the outer frame, the adjacent side walls of the moving plate and the outer frame respectively containing complementary zigzag patterns defining a zigzag gap between the adjacent side walls of the moving plate and the outer frame;

disposing the liquid adhesive in the zigzag gap such that the liquid adhesive creates the capillary force between the adjacent side walls of the moving plate and the outer frame that draws the moving plate and the deployment flexure laterally toward the outer plate, thereby causing the motion control flexure to separate the fixed frame and the moveable frame so that the fixed frame and the movable frame are coplanar, parallel, and spaced apart by the selected distance; and

curing the liquid adhesive.

15. The method of claim 11, further comprising rotating the element about the central axis of the element, and wherein the separating comprises:

forming a plurality of moving plates respectively interleaved between a corresponding plurality of stationary plates attached to the outer frame and defining a corresponding plurality of gaps between respective outer sidewalls of the moving plates and respective inner sidewalls of the stationary plates, a penultimately innermost one of the moving plates having an L-shaped arm overarching an innermost one of the stationary plates and extending downwardly and adjacent to an upper end of an inner side wall of an innermost one of the moving plates;

coupling an outermost one of the moving plates to an outermost one of the stationary plates with an attachment spring;

coupling adjacent ones of the moving plates intermediate the outermost and innermost ones of the stationary plates to each other with attachment springs;

coupling the innermost one of the moving plates to the motion control flexure with a deployment flexure; and

,

disposing the liquid adhesive in the gaps such that the liquid adhesive creates the capillary force between the adjacent side walls of the moving plates and the stationary plates that draws the moving plates and the deployment flexure laterally, thereby causing the motion control flexure to separate the fixed frame and the moveable frame so that the fixed frame and the movable frame are coplanar, parallel, and spaced apart by the selected distance.

16. The method of claim 11, further comprising curing the liquid adhesive such that the moveable frame is fixed in a deployed position, wherein an outer end of the motion control flexure is coupled to the outer frame by a plurality of attachment springs coupled to each other and to the motion control flexure at a nexus,

wherein an inner end of the motion control flexure is coupled to the moving frame, and

wherein the separating comprises:

forming a moving plate rotatably attached to a stationary plate by a hinge at a lower end thereof and defining an angular gap between adjacent sidewalls of the moving plate and the stationary plate;

forming a connection beam coupling the moving plate to the nexus; and

,

disposing the liquid adhesive in the angular gap such that the liquid adhesive creates the capillary force between the adjacent side walls of the moving plate and the stationary plate that rotates the moving plate and connection beam laterally about the hinge and toward the stationary plate, thereby causing the motion control flexure to separate the fixed frame and the moveable frame so that the fixed frame and the movable frame are coplanar, parallel, and spaced apart by the selected distance.

17. The method of claim 11, wherein the device is an electronic device, and wherein the separating comprises:

forming a moving plate rotatably attached to a stationary plate by a hinge at a lower end thereof and defining an angular gap between adjacent sidewalls of the moving plate and the stationary plate;

coupling an inner end of the moving plate to the moveable frame with a deployment flexure; and

,

disposing the liquid adhesive in the angular gap such that the liquid adhesive creates the capillary force between the adjacent side walls of the moving plate and the stationary plate that rotates the moving plate and deployment flexure laterally about the hinge and toward the stationary plate, thereby causing the movable frame and the fixed frame to separate so that the fixed frame and the movable frame are coplanar, parallel, and spaced apart by the selected distance.

18. The method of claim 11, wherein the device is a camera.

19. A method, comprising:

moving a structure with an actuator, the actuator having;

an outer frame,

a fixed frame attached to the outer frame,

a moveable frame disposed parallel to the fixed frame;

a motion control flexure coupling the moveable frame to the outer frame;

a hydrophilic moving plate;

wherein the moveable frame and the fixed frame are initially spaced a selected distance apart for substantially rectilinear movement relative to each other; and

a cured liquid adhesive attached to the hydrophilic moving plate that cooperates with the hydrophilic moving plate to initially space the movable frame and the fixed frame apart at the selected distance; and

wherein the moving the structure with the actuator comprises;

moving the structure with the moveable frame in a rectilinear motion relative to the fixed and outer frames, and

moving the structure with the moveable frame in a rotational movement about a central axis of the structure.

20. The method of claim 19, wherein the structure comprises an optical element.