Microelectromechanical system device including a metal proof mass and a piezoelectric component
First Claim
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1. An apparatus comprising:
- a metal layer;
a first dielectric layer disposed on the metal layer;
a first electrode layer disposed on the first dielectric layer;
a piezoelectric layer disposed on the first electrode layer, the piezoelectric layer configured to respond to at least one of an electric field or a mechanical force, wherein an entire area of the metal layer is equal to or greater than an entire area of the piezoelectric layer;
a second electrode layer disposed on the piezoelectric layer, the first electrode layer and the second electrode layer configured to apply the electric field across the piezoelectric layer or to sense an electric field generated by the piezoelectric layer due to the mechanical force; and
a second dielectric layer disposed on the second electrode layer.
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Abstract
This disclosure provides systems, apparatus, and devices and methods of fabrication for electromechanical devices. In one implementation, an apparatus includes a metal proof mass and a piezoelectric component as part of a MEMS device. Such apparatus can be particularly useful for MEMS gyroscope devices. For instance, the metal proof mass, which may have a density several times larger than that of silicon, is capable of reducing the quadrature and bias error in a MEMS gyroscope device, and capable of increasing the sensitivity of the MEMS gyroscope device.
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Citations
13 Claims
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1. An apparatus comprising:
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a metal layer; a first dielectric layer disposed on the metal layer; a first electrode layer disposed on the first dielectric layer; a piezoelectric layer disposed on the first electrode layer, the piezoelectric layer configured to respond to at least one of an electric field or a mechanical force, wherein an entire area of the metal layer is equal to or greater than an entire area of the piezoelectric layer; a second electrode layer disposed on the piezoelectric layer, the first electrode layer and the second electrode layer configured to apply the electric field across the piezoelectric layer or to sense an electric field generated by the piezoelectric layer due to the mechanical force; and a second dielectric layer disposed on the second electrode layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification