Cavity resonators integrated on MMIC and oscillators incorporating the same
First Claim
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1. A semiconductor-based monolithic microwave integrated circuit (MMIC), comprising:
- a cavity resonator comprising;
a cavity defined by an upper metal surface and a lower metal surface, the cavity being a low conductivity semiconductor material;
a plurality of discrete metal connections coupled between the upper and lower metal surfaces; and
at least one port for coupling to the cavity electromagnetically, and one or more active devices.
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Abstract
A cavity resonator integrated on a monolithic microwave integrated circuit (MMIC) is provided. The cavity resonator includes a cavity defined by an upper metal surface and a lower metal surface embedded in a low conductivity semiconductor, and a plurality of discrete metal connections coupled between the upper and lower metal surfaces, and at least one port for coupling to the cavity electromagnetically.
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Citations
20 Claims
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1. A semiconductor-based monolithic microwave integrated circuit (MMIC), comprising:
a cavity resonator comprising; a cavity defined by an upper metal surface and a lower metal surface, the cavity being a low conductivity semiconductor material; a plurality of discrete metal connections coupled between the upper and lower metal surfaces; and at least one port for coupling to the cavity electromagnetically, and one or more active devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An oscillator comprising:
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a semiconductor-based monolithic microwave integrated circuit (MIMIC); a cavity resonator, including; a cavity defined by an upper metal surface and a lower metal surface, the cavity being a low conductivity semiconductor material, a plurality of discrete metal connections coupled between the upper and lower metal surfaces; and a first pair of ports for coupling to the cavity electromagnetically; and a first amplifier coupled between the first pair of ports of the cavity resonator in a first feedback loop, wherein the semiconductor-based MMIC includes; the cavity resonator; and the first amplifier. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification