Flow sensor assembly
First Claim
Patent Images
1. A flow sensor assembly, comprising:
- a housing defining an inlet, an outlet, and a flow channel extending between the inlet and the outlet, the flow channel configured to accept a flow of fluid;
the housing defining a bypass channel that allows part of the flow of fluid through the flow channel to bypass part of the flow channel, the bypass channel is configured to reverse the direction of the flow of fluid in the bypass channel at least once upstream of a sensing location;
a flow sensor die having two or more sense elements, one or more heater elements, and one or more bond pads operatively coupled to the two or more sense elements and the one or more heater elements, the one or more bond pads are positioned in a first region of the flow sensor die and the two or more sense elements and the one or more heater elements are positioned in a second region of the flow sensor die;
the flow sensor die is secured relative to the housing at the sensing location of the bypass channel such that the two or more sense elements are in thermal communication with the flow of fluid in the bypass channel;
the housing defining a partition between the first region and the second region of the flow sensor die when the flow sensor die is secured relative to the housing at the sensing location; and
an encapsulant provided adjacent the first region of the flow sensor die to cover the one or more bond pads of the flow sensor die, the partition of the housing substantially containing the encapsulant from covering the two or more sense elements and the one or more heater elements that are positioned in the second region of the flow sensor die.
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Abstract
A flow sensor assembly that may include features that help prevent moisture from reaching a sensor die of the flow sensor assembly. In some cases, such features may include a bypass channel that is configured to reverse the direction of the flow of fluid at least once upstream of the sensor die. In some cases, an encapsulant may cover one or more bond pads of the sensor die. In some cases, an output of the flow sensor assembly may be a raw sensor output signal produced by the one or more sensor elements of the sensor die, without significant processing of the raw sensor signal.
223 Citations
17 Claims
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1. A flow sensor assembly, comprising:
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a housing defining an inlet, an outlet, and a flow channel extending between the inlet and the outlet, the flow channel configured to accept a flow of fluid; the housing defining a bypass channel that allows part of the flow of fluid through the flow channel to bypass part of the flow channel, the bypass channel is configured to reverse the direction of the flow of fluid in the bypass channel at least once upstream of a sensing location; a flow sensor die having two or more sense elements, one or more heater elements, and one or more bond pads operatively coupled to the two or more sense elements and the one or more heater elements, the one or more bond pads are positioned in a first region of the flow sensor die and the two or more sense elements and the one or more heater elements are positioned in a second region of the flow sensor die; the flow sensor die is secured relative to the housing at the sensing location of the bypass channel such that the two or more sense elements are in thermal communication with the flow of fluid in the bypass channel; the housing defining a partition between the first region and the second region of the flow sensor die when the flow sensor die is secured relative to the housing at the sensing location; and an encapsulant provided adjacent the first region of the flow sensor die to cover the one or more bond pads of the flow sensor die, the partition of the housing substantially containing the encapsulant from covering the two or more sense elements and the one or more heater elements that are positioned in the second region of the flow sensor die. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A flow sensor assembly, comprising:
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a housing defining an inlet, and outlet, and a flow channel extending between the inlet and the outlet, the flow channel configured to accept a flow of fluid; the housing defining a bypass channel that allows part of the flow of fluid through the flow channel to bypass part of the flow channel, the bypass channel is configured to reduce moisture ingress to a sensing location in the bypass channel; a flow sensor die having one or more sense elements and one or more bond pads operatively coupled to the one or more sense elements, the one or more bond pads are positioned in a first region of the flow sensor die and the one or more sense elements are positioned in a second region of the flow sensor die; the flow sensor die is secured relative to the housing at the sensing location of the bypass channel such that the one or more sense elements are in thermal communication with the flow of fluid in the bypass channel; one or more wire bonds bonded to the one or more wire bond pads; an encapsulant provided adjacent the first region of the flow sensor die to cover the one or more bond pads of the flow sensor die and the one or more wire bonds; and wherein an output of the flow sensor assembly is a raw sensor output signal produced by the one or more sensor elements. - View Dependent Claims (13, 14, 15, 16, 17)
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Specification