Tri-axis accelerometer having a single proof mass and fully differential output signals

• US 9,003,885 B2
• Filed: 03/14/2013
• Issued: 04/14/2015
• Est. Priority Date: 08/30/2006
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Lang, Christoph, Yama, Gary, Ulm, Markus, Pan, Zhiyu, Metz, Matthias
• Primary Examiner(s): Martin, Laura
• Assistant Examiner(s): Shah, Samir M
• Application Number:
  US13/831,040
• Publication Number:
  US 20140102194A1
• Time in Patent Office: 761 Days
• Field of Search: 734/88, 735/041.2, 735/041.3, 735/140.1, 735/142.4, 735/142.9, 735/143.4, 735/143.8
• US Class Current: 73/514.01
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/09 by piezoelectric pick-up
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

Claims

1. A tri-axis accelerometer, comprising:

a proof mass;

a plurality of anchor points arranged in at least two pairs opposite one another along at least two axial directions that are perpendicular to one another;

a plurality of spring units to connect the proof mass to the plurality of anchor points, the spring units each including a respective pair of identical springs; and

a respective sensing unit arranged on each of the springs.

2. The tri-axis accelerometer of claim 1, wherein the pair of identical springs are arranged to detect a fully differential output signal.

3. The tri-axis accelerometer of claim 2, wherein the pair of identical springs are arranged parallel to each other and perpendicular with respect to a longitudinal axis along the connection between the proof mass and a respective anchor point.

4. The tri-axis accelerometer of claim 2, further comprising:

only one pick-up circuitry to detect the fully differential output signal of each pair of identical springs.

5. The tri-axis accelerometer of claim 1, wherein the proof mass, plurality of anchor points, and plurality of springs are arranged on one monolithic microchip.

6. The tri-axis accelerometer of claim 1, wherein at least one of (a) the plurality of anchor points are positioned external to the proof mass and (b) the plurality of spring units are positioned external to the proof mass.

7. The tri-axis accelerometer of claim 6, wherein the plurality of spring units are positioned external to the proof mass.

8. The tri-axis accelerometer of claim 7, wherein the plurality of anchor points are positioned external to the proof mass.

9. The tri-axis accelerometer of claim 6, wherein the plurality of anchor points are positioned external to the proof mass.

10. The tri-axis accelerometer of claim 1, wherein, with respect to each of at least one of the spring units, the respective pair of identical springs of the respective spring unit is arranged entirely in sequence between the proof mass and a respective one of the anchor points.

11. The tri-axis accelerometer of claim 10, wherein, with respect to the each of at least one of the spring units:

a first of the pair of identical springs is separated from the respective anchor point by a second of the pair of identical springs and is adjacent to, and connects the respective spring unit to, the proof mass; and

the second of the pair of identical springs is separated from the proof mass by the first of the pair of identical springs and is adjacent to, and connects the respective spring unit to, the respective anchor point.

12. The tri-axis accelerometer of claim 1, wherein, with respect to each of at least one of the spring units, neither the proof mass nor any of the anchor points separates the respective pair of identical springs of the respective sprint unit from each other.

13. The tri-axis accelerometer of claim 1, wherein, with respect to each of at least one of the spring units, the respective pair of identical springs of the respective spring unit include bars whose longitudinal axes are parallel to each other and perpendicular to a longitudinal axis along the connection between the proof mass and a respective anchor point to which the respective spring unit connects the proof mass.

14. A tri-axis accelerometer, comprising:

a proof mass;

a plurality of anchor points arranged in at least two pairs opposite one another along at least two axial directions that are perpendicular to one another; and

a plurality of spring units to connect the proof mass to the plurality of anchor points, wherein the spring units each;

extends alongside at least one external edge of, and external to, the proof mass; and

includes a pair of identical springs, each spring including a sensing unit.

15. A tri-axis accelerometer, comprising:

a proof mass;

a plurality of anchor points arranged in at least two pairs opposite one another along at least two axial directions that are perpendicular to one another;

a plurality of spring units to connect the proof mass to the plurality of anchor points, the spring units each including a respective pair of identical springs; and

for each of the springs units, at least one respective sensing unit arranged on at least one of the identical springs of the spring unit.

16. The tri-axis accelerometer of claim 15, wherein, for the each of the spring units, the respective at least one sensing unit includes a respective sensing unit arranged on each of the respective springs of the respective spring unit.

17. The tri-axis accelerometer of claim 16, wherein:

for each of the spring units;

(a) a respective first signal of the respective sensing units of the spring unit is provided to a first input of a comparator; and

(b) a respective second signal of the respective sensing units of the spring unit is provided to a second input of the comparator; and

the comparator compares the signals of the first input to the signals of the second input.

18. The tri-axis accelerometer of claim 16, wherein:

for each of a first pair of the spring units arranged opposite each other along a first of the at least two axial directions;

(a) a respective first signal of the respective sensing units of the spring unit is used for providing a first input of a first comparator; and

(b) a respective second signal of the respective sensing units of the spring unit is used for providing a second input of the first comparator;

the first comparator compares the signals of the first and second inputs of the first comparator to each other;

for each of a second pair of the spring units arranged opposite each other along a second of the at least two axial directions;

(a) a respective first signal of the respective sensing units of the spring unit is used for providing a first input of a second comparator; and

(b) a respective second signal of the respective sensing units of the spring unit is used for providing a second input of the second comparator; and

the second comparator compares the signals of the first and second input of the second comparator to each other.

19. The tri-axis accelerometer of claim 16, wherein:

for each of a first pair of the spring units arranged opposite each other along a first of the at least two axial directions, a respective pair of signals of the respective sensing units of the spring unit is used for providing a respective input of a first comparator;

the first comparator compares the signals of the respective inputs of the first comparator;

for each of a second pair of the spring units arranged opposite each other along a second of the at least two axial directions, a respective pair of signals of the respective sensing units of the spring unit is used for providing a respective input of a second comparator; and

the second comparator compares the signals of the respective inputs of the second comparator.

20. The tri-axis accelerometer of claim 15, wherein, with respect to each of at least one of the spring units, the respective pair of identical springs of the respective spring unit is arranged entirely in sequence between the proof mass and a respective one of the anchor points.

21. The tri-axis accelerometer of claim 20, wherein, with respect to the each of at least one of the spring units:

a first of the pair of identical springs is separated from the respective anchor point by a second of the pair of identical springs and is adjacent to, and connects the respective spring unit to, the proof mass; and

the second of the pair of identical springs is separated from the proof mass by the first of the pair of identical springs and is adjacent to, and connects the respective spring unit to, the respective anchor point.

22. The tri-axis accelerometer of claim 15, wherein, with respect to each of at least one of the spring units, neither the proof mass nor any of the anchor points separates the respective pair of identical springs of the respective spring unit from each other.

23. The tri-axis accelerometer of claim 15, wherein, with respect to each of at least one of the spring units, the respective pair of identical springs of the respective spring unit include bars whose longitudinal axes are parallel to each other and perpendicular to a longitudinal axis along the connection between the proof mass and a respective anchor point to which the respective spring unit connects the proof mass.