Resonant pressure sensor and method of manufacturing the same
First Claim
1. A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm, the resonant pressure sensor comprising:
- a sensor substrate that is made of silicon and includes one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm;
a base substrate that is made of silicon and includes one surface directly bonded with the other surface of the sensor substrate;
a concave portion that is formed in a portion of the base substrate that bonds with the sensor substrate, functions as the diaphragm in the sensor substrate, and includes a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements;
one or more conducting holes that conduct measuring pressure to the concave portion; and
a fluid that propagates pressure to the concave portion through the conducting hole and suppresses vibration of the diaphragm.
1 Assignment
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Accused Products
Abstract
A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm may include a sensor substrate made of silicon and including one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm, a base substrate made of silicon and including one surface directly bonded with the other surface of the sensor substrate, a concave portion formed in a portion of the base substrate bonding with the sensor substrate, substantially forming the diaphragm in the sensor substrate, and including a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements, one or more conducting holes, and a fluid.
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Citations
24 Claims
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1. A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm, the resonant pressure sensor comprising:
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a sensor substrate that is made of silicon and includes one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm; a base substrate that is made of silicon and includes one surface directly bonded with the other surface of the sensor substrate; a concave portion that is formed in a portion of the base substrate that bonds with the sensor substrate, functions as the diaphragm in the sensor substrate, and includes a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements; one or more conducting holes that conduct measuring pressure to the concave portion; and a fluid that propagates pressure to the concave portion through the conducting hole and suppresses vibration of the diaphragm. - View Dependent Claims (2, 3, 4, 5, 21)
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6. A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm, the resonant pressure sensor comprising:
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a sensor substrate that is made of silicon and includes one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm; a base substrate that is made of silicon and includes one surface directly bonded with the other surface of the sensor substrate; a concave portion that is formed in a portion of the sensor substrate that bonds with the base substrate, functions as the diaphragm in the sensor substrate, and includes a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements; one or more conducting holes that conduct measuring pressure to the concave portion; and a fluid that propagates pressure to the concave portion through the conducting hole and suppresses vibration of the diaphragm. - View Dependent Claims (7, 8, 9, 10, 22)
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11. A method of fabricating a resonant pressure sensor in which one or more resonant-type strain gauges are formed in a diaphragm, the method comprising:
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forming one or more resonant-type strain gauge elements on one surface of a sensor wafer; attaching the surface of the sensor wafer to one surface of a support wafer; grinding and polishing the other surface of the sensor wafer to have a thickness corresponding to a diaphragm; forming a concave portion having a predetermined gap in one surface of a base wafer; directly bonding the other surface of the sensor wafer with one surface of the base wafer; detaching the support wafer from the sensor wafer; and dicing the bounded wafer. - View Dependent Claims (12, 13, 14, 15, 23)
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16. A method of fabricating a resonant pressure sensor in which one or more resonant-type strain gauges are formed in a diaphragm, the method comprising:
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forming one or more resonant-type strain gauge elements on one surface of a sensor wafer; attaching the surface of the sensor wafer to one surface of a support wafer; grinding and polishing the other surface of the sensor wafer to have a thickness corresponding to a diaphragm; forming a concave portion having a predetermined gap in one surface of the sensor wafer; directly bonding the other surface of the sensor wafer with one surface of the base wafer; detaching the support wafer from the sensor wafer; and dicing the bounded wafer. - View Dependent Claims (17, 18, 19, 20, 24)
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Specification