Method for fabricating transfer printing substrate using concave-convex structure, transfer printing substrate fabricated thereby and application thereof
First Claim
1. A method for fabricating a substrate for transfer printing, comprising:
- preparing a handling substrate having a concave-convex structure formed thereon;
forming a sacrificial layer along the concave-convex structure on the handling substrate;
coating a polymer on the handling substrate having the sacrificial layer formed thereon to form a polymer substrate having bumps filling a concave portion of the concave-convex structure;
removing the sacrificial layer from the handling substrate,wherein the concave portion of the concave-convex structure has a pot-shaped longitudinal cross-section, an inlet of which is smaller than a belly thereof.
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Accused Products
Abstract
A method for fabricating a substrate for transfer printing using a concave-convex structure and a substrate for transfer printing fabricated thereby. The method includes preparing a handling substrate having a concave-convex structure formed thereon; forming a sacrificial layer along the concave-convex structure on the handling substrate; coating a polymer on the handling substrate having the sacrificial layer formed thereon to form a polymer substrate having bumps filling a concave portion of the concave-convex structure; and removing the sacrificial layer from the handling substrate. The substrate includes a handling substrate having a concave-convex structure formed thereon; and a polymer substrate placed on the concave-convex structure and having bumps filling a concave portion of the concave-convex structure of the handling substrate. This process of manufacturing provides a device to be stably performed on an ultrathin substrate and may secure high degree of alignment and high transfer yield in a transfer printing process.
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Citations
20 Claims
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1. A method for fabricating a substrate for transfer printing, comprising:
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preparing a handling substrate having a concave-convex structure formed thereon; forming a sacrificial layer along the concave-convex structure on the handling substrate; coating a polymer on the handling substrate having the sacrificial layer formed thereon to form a polymer substrate having bumps filling a concave portion of the concave-convex structure; removing the sacrificial layer from the handling substrate, wherein the concave portion of the concave-convex structure has a pot-shaped longitudinal cross-section, an inlet of which is smaller than a belly thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for fabricating an electronic device for transfer printing, comprising:
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preparing a handling substrate having a concave-convex structure formed thereon; forming a sacrificial layer along the concave-convex structure on the handling substrate; coating a polymer on the handling substrate having the sacrificial layer formed thereon to form a polymer substrate having bumps filling a concave portion of the concave-convex structure; and removing the sacrificial layer from the handling substrate, wherein an electronic device is formed on the polymer substrate before or after removing the sacrificial layer, and wherein the concave portion of the concave-convex structure has a pot-shaped longitudinal cross-section, an inlet of which is smaller than a belly thereof. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A method for fabricating a substrate for transfer printing, comprising:
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preparing a handling substrate having a concave-convex structure formed thereon; forming a sacrificial layer along the concave-convex structure on the handling substrate; coating a polymer on the handling substrate having the sacrificial layer formed thereon to form a polymer substrate having bumps filling a concave portion of the concave-convex structure; removing the sacrificial layer from the handling substrate, wherein the sacrificial layer formed on an upper surface of the convex portion of the concave-convex structure is thicker than the sacrificial layer formed on a lower surface of the concave portion of the concave-convex structure. - View Dependent Claims (18, 19, 20)
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Specification