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Solid-state imaging apparatus and imaging system

  • US 9,007,501 B2
  • Filed: 06/14/2011
  • Issued: 04/14/2015
  • Est. Priority Date: 07/07/2010
  • Status: Active Grant
First Claim
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1. A solid-state imaging apparatus comprising a pixel array in which a plurality of pixels are arranged, wherein the pixel array includes a region to which a fixed electrical potential is supplied and which consists of an electrical conductor,wherein each of the plurality of pixels includes a photoelectric converter arranged in a semiconductor substrate, a charge-voltage converter which converts charges generated by the photoelectric converter into a voltage, a transfer unit which transfers the charges generated by the photoelectric converter to the charge-voltage converter, and an amplification unit which amplifies, by a positive gain, a signal generated by the charge-voltage converter and outputs the amplified signal to an output node,wherein part of a first conductive member that forms the output node is arranged, in a direction perpendicular to a surface of the pixel array, between at least part of the region and at least part of the charge-voltage converter,wherein the charge-voltage converter includes:

  • an impurity region arranged in the semiconductor substrate,a second conductive pattern arranged in a first wiring layer, anda contact plug which connects the impurity region and the second conductive pattern,wherein the first conductive member includes;

    a third conductive pattern arranged in the first wiring layer and including a portion parallel to at least part of the second conductive pattern,a fourth conductive pattern arranged in a second wiring layer above the first wiring layer, anda via plug which connects the third conductive pattern and the fourth conductive pattern,wherein the electrical conductor includes a fifth conductive pattern arranged in a third wiring layer above the second wiring layer, andwherein the fourth conductive pattern is arranged between at least part of the second conductive pattern and at least part of the fifth conductive pattern.

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