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Methods and systems for lithography calibration using a mathematical model for a lithographic process

  • US 9,009,647 B2
  • Filed: 04/08/2013
  • Issued: 04/14/2015
  • Est. Priority Date: 11/06/2008
  • Status: Expired due to Fees
First Claim
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1. A calibration method implemented by a computer, the method comprising:

  • generating, using the computer, a model for a lithographic process, the model comprising a polynomial series expansion around a nominal value of a physical parameter of the lithographic process; and

    fitting the model to measured dimensions of imaging results obtained by applying the lithographic process at a plurality of values of the physical parameter by optimizing at least one polynomial expansion coefficient.

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