Three-dimensional micro-electro-mechanical-system sensor
First Claim
1. A three-dimensional micro-electro-mechanical-system sensor, comprising:
- a substrate;
a fixed frame fixed on the substrate;
a proof mass;
at least one spring part connecting the fixed frame and the proof mass;
a plurality of first electrodes and a plurality of second electrodes respectively extending from the proof mass toward the fixed frame; and
a plurality of third electrodes and a plurality of fourth electrodes respectively extending from the fixed frame toward the proof mass, wherein the first electrodes and the third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and the fourth electrodes form at least one third capacitor,wherein a displacement of the proof mass along a first axis generates a change in the capacitance of the first capacitor, a displacement of the proof mass along a second axis generates a change in the capacitance of the second capacitor, a displacement of the proof mass along a third axis generates a change in the capacitance of the third capacitor, and the first, second, and third axes define a three-dimensional coordinate system;
the first electrodes overlap with the fourth electrodes along the direction of the third axis, and the third electrodes overlap with the second electrodes along the direction of the third axis.
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Abstract
The present invention discloses a three-dimensional micro-electro-mechanical-system sensor. The sensor includes movable first electrodes, plural movable second electrodes, plural fixed third electrodes, and plural fixed fourth electrodes. The first electrodes and their adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and their adjacent fourth electrodes form at least one third capacitor. The capacitance change of the first capacitor reflects the displacement of the proof mass along a first axis, the capacitance change of the second capacitor reflects the displacement of the proof mass along a second axis, and the capacitance change of the third capacitor reflects the displacement of the proof mass along a third axis. The first, second, and third axes define a three-dimensional coordinate system.
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Citations
22 Claims
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1. A three-dimensional micro-electro-mechanical-system sensor, comprising:
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a substrate; a fixed frame fixed on the substrate; a proof mass; at least one spring part connecting the fixed frame and the proof mass; a plurality of first electrodes and a plurality of second electrodes respectively extending from the proof mass toward the fixed frame; and a plurality of third electrodes and a plurality of fourth electrodes respectively extending from the fixed frame toward the proof mass, wherein the first electrodes and the third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and the fourth electrodes form at least one third capacitor, wherein a displacement of the proof mass along a first axis generates a change in the capacitance of the first capacitor, a displacement of the proof mass along a second axis generates a change in the capacitance of the second capacitor, a displacement of the proof mass along a third axis generates a change in the capacitance of the third capacitor, and the first, second, and third axes define a three-dimensional coordinate system;
the first electrodes overlap with the fourth electrodes along the direction of the third axis, and the third electrodes overlap with the second electrodes along the direction of the third axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A three-dimensional micro-electro-mechanical-system sensor, comprising:
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a substrate; a fixed frame fixed on the substrate; a proof mass; at least one spring part connecting the fixed frame and the proof mass; a plurality of first electrodes and a plurality of second electrodes respectively extending from the proof mass toward the fixed frame; and a plurality of third electrodes and fourth electrodes respectively extending from the fixed frame toward the proof mass, wherein; the first electrodes and the third electrodes arranged along a first axis form at least one first capacitor, the first electrodes and the third electrodes arranged along a second axis form at least one second capacitor, a portion of the second electrodes overlapping a portion of the fourth electrodes along a third axis to form at least one third capacitor, the first, second, and third axes are perpendicular to one another; and the first electrodes overlap with the fourth electrodes along the direction of the third axis, and the third electrodes overlap with the second electrodes along the direction of the third axis. - View Dependent Claims (22)
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Specification