Inertial sensor having an oscillating rotating disk
First Claim
1. An inertial rotary movement microsensor for detecting a rotational movement around what is referred to as an axis of rotation (X), provided with a part that is movable relative to a fixed part, the movable part comprising:
- an excitation mass configured to undergo an oscillating movement around what is referred to as an excitation axis (Z) by an exciter so as to generate a Coriolis force induced by the rotational movement,a detection mass kinematically connected to the excitation mass by a linkage configured to transmit the Coriolis force at least partly without transmitting the oscillating movement around the excitation axis (Z) at least partly, and having one degree of freedom in rotation around what is known as an oscillation axis (Y), perpendicular to the axis of rotation (X), anda detector configured to measure the Coriolis force transmitted to the detection mass,wherein the detector is provided with at least one strain gauge suspended between the detection mass and an anchoring part integral with the fixed part, and wherein the at least one strain gauge is connected to the detection mass at a height level in the excitation axis (Z) different from that of the oscillation axis (Y) of the detection mass.
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Abstract
The present invention relates to an inertial rotary movement microsensor for detecting a rotational movement around what is referred to as an axis of rotation (X), provided with a part that is movable relative to a fixed part, the movable part comprising an excitation mass configured to undergo an oscillating movement in an excitation direction (Z) by an exciter so as to generate a Coriolis force induced by the rotational movement, a detection mass kinematically connected to the excitation mass by a linkage configured to transmit the Coriolis force at least partly without transmitting the oscillating movement around the excitation axis at least partly, a detector configured to measure the Coriolis force transmitted to the detection mass, characterized in that the detector is provided with at least one strain gauge suspended between the detection mass and an anchoring part integral with the fixed part.
Application to the technologies known as MEMS.
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Citations
25 Claims
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1. An inertial rotary movement microsensor for detecting a rotational movement around what is referred to as an axis of rotation (X), provided with a part that is movable relative to a fixed part, the movable part comprising:
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an excitation mass configured to undergo an oscillating movement around what is referred to as an excitation axis (Z) by an exciter so as to generate a Coriolis force induced by the rotational movement, a detection mass kinematically connected to the excitation mass by a linkage configured to transmit the Coriolis force at least partly without transmitting the oscillating movement around the excitation axis (Z) at least partly, and having one degree of freedom in rotation around what is known as an oscillation axis (Y), perpendicular to the axis of rotation (X), and a detector configured to measure the Coriolis force transmitted to the detection mass, wherein the detector is provided with at least one strain gauge suspended between the detection mass and an anchoring part integral with the fixed part, and wherein the at least one strain gauge is connected to the detection mass at a height level in the excitation axis (Z) different from that of the oscillation axis (Y) of the detection mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An inertial rotary movement microsensor for detecting a rotational movement around what is referred to as an axis of rotation (X), provided with a part that is movable relative to a fixed part, the movable part comprising:
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an excitation mass configured to undergo an oscillating movement around what is referred to as an excitation axis (Z) by an exciter so as to generate a Coriolis force induced by the rotational movement, a detection mass kinematically connected to the excitation mass by a linkage configured to transmit the Coriolis force at least partly without transmitting the oscillating movement around the excitation axis (Z) at least partly, and having one degree of freedom in rotation around what is known as an oscillation axis (Y), perpendicular to the axis of rotation (X), a detector configured to measure the Coriolis force transmitted to the detection mass, wherein the detector is provided with at least one strain gauge suspended between the detection mass and an anchoring part integral with the fixed part, an additional mass connected to the excitation mass so as to exhibit a vibration movement in a direction perpendicular to the excitation axis (Z) and so as to generate a Coriolis force induced by a rotational movement of the additional mass in the excitation axis (Z), and an additional detector configured to measure the Coriolis force induced by a rotational movement of the additional mass in the excitation axis (Z). - View Dependent Claims (24, 25)
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Specification