Device for measuring forces and method of making the same

• US 9,010,200 B2
• Filed: 08/06/2012
• Issued: 04/21/2015
• Est. Priority Date: 08/06/2012
• Status: Expired due to Fees

• Current Assignee: Amphenol Thermometrics, Inc. (Amphenol Corporation)
• Original Assignee: Amphenol Thermometrics, Inc. (Amphenol Corporation)
• Inventors: Gamage, Sisira Kankanam, Mantravadi, Naresh Venkata, Miclaus, Calin Victor
• Primary Examiner(s): Noori, Max
• Application Number:
  US13/567,723
• Publication Number:
  US 20140033833A1
• Time in Patent Office: 988 Days
• Field of Search: 737/60, 737/77, 73862625-862627
• US Class Current: 73/862.627
• CPC Class Codes: G01L 9/0047 Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness

Abstract

A device for measuring forces and a method of making the same. The device has a boss structure within a diaphragm cavity, wherein the boss structure has substantially parallel sidewalls. One or more sensors are installed proximate to the diaphragm to sense flexure in the diaphragm, which is controlled by the boss structure.

Claims

1. A device for measuring forces, the device comprising:

a first wafer comprising a first buried oxide layer disposed between a first device layer and a second device layer;

a second wafer joined to the first device layer by a second buried oxide layer;

a diaphragm cavity extending from the second device layer, through the first device layer, the second buried oxide layer, and the second wafer, wherein the second device layer forms a diaphragm over the diaphragm cavity;

a boss structure within the diaphragm cavity, the boss structure extending from the first buried oxide layer, the boss structure having substantially parallel sidewalls; and

a first sensor in the second device layer proximate to the diaphragm to sense flexure in the diaphragm.

2. The device of claim 1, wherein the boss structure having substantially uniform thickness over its width.

3. The device of claim 1, wherein the first sensor comprises a piezoresistor.

4. The device of claim 1, further comprising a second sensor in the second device layer proximate to the diaphragm, the first and second sensors flanking the boss structure.

5. The device of claim 4, further comprising a first and second metallization layer disposed on the first and second sensors, respectively.

6. The device of claim 1, further comprising a substrate bonded to the second wafer.

7. The device of claim 6, wherein the substrate comprises a preformed hole that connects the diaphragm cavity to an environment surrounding the device.

8. The device of claim 1, wherein the second device layer has first and second exposed portions that are exposed to the diaphragm cavity, the first and second exposed portions flanking the boss structure.

9. The device of claim 8, wherein the second buried oxide layer comprises a portion that is contiguous with both the boss structure and the second device layer and disposed between first and second exposed portions of the second device layer.

11. The device of claim 1, wherein said boss is configured to tune sensitivity of the diaphragm.

12. The device of claim 1, wherein said boss changes the flexure of the diaphragm.

13. The device of claim 1, wherein said boss is aligned with the diaphragm.

10. A device for measuring forces, the device comprising:

a first wafer comprising a first buried oxide layer disposed between a first device layer and a second device layer;

a second wafer joined to the first device layer by a second buried oxide layer;

a diaphragm cavity extending from the second device layer, through the first device layer, the second buried oxide layer, and the second wafer, wherein the second device layer forms a diaphragm over the diaphragm cavity;

a boss structure within the diaphragm cavity, the boss structure extending from the first buried oxide layer, the boss structure having substantially parallel sidewalls and substantially uniform thickness over its width; and

a first sensor in the second device layer proximate to the diaphragm to sense flexure in the diaphragm.