System and method for three-dimensional schematic capture and result visualization of multi-physics system models

• US 9,015,016 B2
• Filed: 11/25/2008
• Issued: 04/21/2015
• Est. Priority Date: 11/30/2007
• Status: Active Grant

• Current Assignee: Coventor, Inc. (Lam Research Corporation)
• Original Assignee: Coventor, Inc. (Lam Research Corporation)
• Inventors: Lorenz, Gunar, Kamon, Mattan
• Primary Examiner(s): Saxena, Akash
• Application Number:
  US12/323,058
• Publication Number:
  US 20090144042A1
• Time in Patent Office: 2,338 Days
• Field of Search: 703/1, 703/3, 703/4, 703/6, 703/7, 703/13, 703/14, 703/16, 716/100, 716/106
• US Class Current: 703/7
• CPC Class Codes: G06F 2111/12 Symbolic schematics
• CPC Class Codes: G06F 2111/20 Configuration CAD, e.g. designing by assembling or positioning modules selected from libraries of predesigned modules
• CPC Class Codes: G06F 2115/04 Micro electro-mechanical systems [MEMS]
• CPC Class Codes: G06F 2115/08 Intellectual property [IP] blocks or IP cores
• CPC Class Codes: G06F 2117/08 HW-SW co-design, e.g. HW-SW partitioning
• CPC Class Codes: G06F 30/17 Mechanical parametric or variational design
• CPC Class Codes: G06F 30/20 Design optimisation, verification or simulation optimisation, verification or simulation of circuit designs G06F30/30
• CPC Class Codes: G06F 30/30 Circuit design
• CPC Class Codes: G06F 30/33 Design verification, e.g. functional simulation or model checking
• CPC Class Codes: G06F 30/3308 using simulation

Abstract

A 3-D multi-physics design environment (“3-D design environment”) for designing and simulating multi-physics devices such as MEMS devices is discussed. The 3-D design environment is programmatically integrated with a system modeling environment that is suitable for system-level design and simulation of analog-signal ICs, mixed-signal ICs and multi-physics systems. A parameterized MEMS device model is created in a 3-D graphical view in the 3-D design environment using parameterized model components that are each associated with an underlying behavioral model. After the MEMS device model is completed, it may be exported to a system modeling environment without subjecting the model to preliminary finite element meshing.

Claims

1. A computer-implemented method of designing and simulating Micro Electro-Mechanical System (MEMS) devices, comprising:

receiving a user input selecting a plurality of parameterized components from a MEMS component library, each of the parameterized components being parametric and associated with a behavioral model;

assembling a new parameterized MEMS device model in a three-dimensional (3-D) graphical view generated by a 3-D MEMS design environment, by connecting, in response to user commands, representations of the selected parameterized components in the 3-D graphical view, the assembling automatically creating the new parameterized MEMS device model using the behavioral models of the selected components and data indicating how the representations of the components are connected in the 3-D graphical view;

exporting a symbol representing the new parameterized MEMS device model from the 3-D MEMS design environment into a system modeling environment; and

automatically providing the behavioral models associated with the parameterized components of the new parameterized MEMS device model to a circuit simulator for evaluation during simulations or co-simulations of the system.

2. The method of claim 1, further comprising:

receiving, by the 3-D MEMS design environment, the results of a circuit simulation or co-simulation of a schematic design performed in the system modeling environment that utilized the new parameterized MEMS device model; and

displaying the results of the circuit simulation or co-simulation in the 3-D graphical view in the 3-D MEMS design environment.

3. The method of claim 2 wherein displaying the results further comprises:

animating the motion of a MEMS device associated with the new parameterized MEMS device model while displaying the results of the circuit simulation or co-simulation in the 3-D graphical view in the 3-D MEMS design environment.

4. The method of claim 1, further comprising:

evaluating the new parameterized MEMS device model using the MEMS component library during the circuit simulation or co-simulation, the evaluating occurring during a DC, AC or transient simulation following an establishment of communication between the circuit simulator or co-simulator in the system modeling environment and the MEMS component library.

5. The method of claim 1 wherein the symbol includes pins representing electrical connections for the new parameterized MEMS device model.

6. The method of claim 5 wherein the number of pins on the symbol is configurable by a user while creating the new parameterized MEMS device model.

7. The method of claim 1, further comprising:

exporting a parameterized layout cell from the 3-D MEMS design environment to a layout editor or viewer in the system modeling environment allowing the display of the layout cell, the parameterized layout cell being used to generate a visible instance of the layout of a MEMS device associated with the new parameterized MEMS device model.

8. The method of claim 1, wherein the selecting of a plurality of parameterized components, further comprises:

indicating at least one parameter of one of the selected parameterized components to be hidden or exposed in the system modeling environment.

9. The method of claim 1 wherein at least one of the selected parameterized components includes a material parameter.

10. The method of claim 1 wherein at least one of the selected parameterized components includes a fabrication process parameter.

11. A computer-implemented method of designing and simulating Micro Electro-Mechanical System (MEMS) devices, comprising:

importing a parameterized MEMS device model into a system modeling environment, the parameterized MEMS device model assembled initially in a three-dimensional (3-D) graphical view generated by a 3-D MEMS design environment, by connecting, in response to user commands, representations of a plurality of parameterized components selected from a MEMS component library, each of the parameterized components associated with a behavioral model, the assembling automatically creating the parameterized MEMS device model using the behavioral models of the selected components and data indicating how the representations of the components are connected in the 3-D graphical view;

connecting a symbol representative of the parameterized MEMS device model into a schematic in the system modeling environment, the schematic displaying an integrated circuit (IC) design; and

performing a circuit simulation or co-simulation of the schematic in the system modeling environment.

12. The method of claim 11, further comprising:

importing a parameterized layout cell from the 3-D MEMS design environment into a layout editor in the system modeling environment; and

generating a layout instance of a MEMS device associated with the parameterized MEMS device model from the parameterized layout cell.

13. The method of claim 11, further comprising:

exporting the results of the performed circuit simulation or co-simulation to the 3-D MEMS design environment.

14. The method of claim 11 wherein a netlist containing connectivity information for the MEMS device model is received by the system modeling environment from the 3-D MEMS design environment.

15. A non-transitory computer-readable medium holding computer-executable instructions for designing and simulating Micro Electro-Mechanical System (MEMS) devices, the instructions when executed causing a computing device to:

receive a user input selecting a plurality of parameterized components from a MEMS component library, each of the parameterized components being parametric and associated with a behavioral model;

assemble a new parameterized MEMS device model in a three-dimensional (3-D) graphical view generated by the 3-D MEMS design environment by connecting, in response to user commands, representations of the selected parameterized components in the 3-D graphical view, the assembling automatically creating the new parameterized device model using the behavioral models of the selected components and data indicating how the representations of the components are connected in the 3-D graphical view;

export a symbol representing the new parameterized MEMS device model from the 3-D MEMS design environment into a system modeling environment; and

automatically provide the behavioral models associated with the parameterized components of the new parameterized MEMS device model to a circuit simulator for evaluation during simulations or co-simulations of the system.

16. The medium of claim 15 wherein the instructions further cause the computing device to:

receive, by the 3-D MEMS design environment, the results of a circuit simulation or co-simulation of a schematic design performed in the system modeling environment; and

display the results of the circuit simulation or co-simulation in the 3-D graphical view in the 3-D MEMS design environment.

17. The medium of claim 16 wherein the execution of the instructions for displaying the results cause the computing device to:

animate the motion of a MEMS device associated with the new parameterized MEMS device model while displaying the results of the circuit simulation or co-simulation in the 3-D graphical view in the 3-D MEMS design environment.

18. The medium of claim 16, wherein the execution of the instructions cause the computing device to:

evaluate the new parameterized MEMS device model using the MEMS component library during the circuit simulation or co-simulation, the evaluating occurring during a DC, AC or transient simulation following an establishment of communication between the circuit simulator or co-simulator in the system modeling environment and the MEMS component library.

19. The medium of claim 15 wherein the symbol includes pins representing electrical connections for the new parameterized MEMS device model.

20. The medium of claim 19 wherein the number of pins on the symbol is configurable by a user while creating the new parameterized MEMS device model.

21. The medium of claim 15 wherein the execution of the instructions cause the computing device to:

export a parameterized layout cell from the 3-D MEMS design environment to a layout editor following the display, the layout cell used to generate a layout of a MEMS device associated with the new parameterized MEMS device model.

22. The medium of claim 15, wherein the execution of the instructions for selecting of a plurality of parameterized components cause the computing device to:

identify at least one parameter of one of the selected parameterized components as hidden or exposed in the system modeling environment.

23. The medium of claim 15 wherein at least one of the selected parameterized components includes a material parameter.

24. The medium of claim 15 wherein at least one of the selected parameterized components includes a fabrication process parameter.

25. A non-transitory computer-readable medium holding computer-executable instructions for designing and simulating Micro Electro-Mechanical System (MEMS) devices, the instructions when executed causing a computing device to:

import a parameterized MEMS device model into a system modeling environment, the parameterized MEMS device model assembled initially in a three-dimensional (3-D) graphical view generated by a 3-D MEMS design environment, by connecting, in response to user commands, representations of a plurality of parameterized components selected from a MEMS component library, each of the parameterized components associated with a behavioral model, the assembling automatically creating the parameterized MEMS device model using the behavioral models of the selected components and data indicating how the representations of the components are connected in the 3-D graphical view;

connect a symbol representative of the parameterized MEMS device model into a schematic in the system modeling environment, the schematic displaying an integrated circuit (IC) design; and

perform a circuit simulation or co-simulation of the schematic in the system modeling environment.

26. The medium of claim 25, wherein the execution of the instructions further cause the computing device to:

import a parameterized layout cell from the 3-D MEMS design environment into a layout editor; and

generating a layout of a MEMS device associated with the parameterized MEMS device model from the parameterized layout cell.

27. The medium of claim 25, further comprising:

exporting the results of the performed circuit simulation or co-simulation to the 3-D MEMS design environment.

28. The medium of claim 25 wherein a netlist containing connectivity information for the parameterized MEMS device model is received by the system modeling environment from the 3-D MEMS design environment.

29. A computer-implemented system for designing and simulating Micro Electro-Mechanical System (MEMS) devices, comprising:

a computing device hosting, or in communication with, a three-dimensional (3-D) MEMS design environment and a system modeling environment, the 3-D MEMS design environment enabling;

receiving a user input selecting a plurality of parameterized components from a MEMS component library, each of the parameterized components being parametric and associated with a behavioral model;

assembling a new parameterized MEMS device model in a 3-D graphical view generated by the 3-D MEMS design environment, by connecting, in response to user commands, representations of the selected parameterized components in the 3-D graphical view, the assembling automatically creating the new parameterized MEMS device model using the behavior models of the selected components and data indicating how the representations of the components are connected in the 3-D graphical view;

exporting a symbol representing the new parameterized MEMS device model from the 3-D MEMS design environment into the system modeling environment;

automatically providing the behavioral models associated with the parameterized components of the new parameterized MEMS device model to a circuit simulator for evaluation during simulations or co-simulations of the system; and

receiving, by the 3-D MEMS design environment, the results of a circuit simulation or co-simulation of a schematic design performed in the system modeling environment that utilized the new parameterized MEMS device model; and

a display device in communication with the computing device, the display device displaying the results of the circuit simulation or co-simulation in the 3-D graphical view.

30. The system of claim 29 wherein one of the selected parameterized components includes a material parameter.

31. The system of claim 29 wherein one of the selected parameterized components includes a fabrication process parameter.

32. The system of claim 29 wherein the display of the results in the 3-D MEMS design environment animates a motion of a MEMS device associated with the new parameterized MEMS device model.