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Variable capacitance sensors and methods of making the same

  • US 9,018,060 B2
  • Filed: 06/02/2011
  • Issued: 04/28/2015
  • Est. Priority Date: 06/15/2010
  • Status: Active Grant
First Claim
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1. A variable capacitance sensor comprising:

  • a first conductive electrode comprising electrically interconnected first conductive sheets;

    a second conductive electrode comprising electrically interconnected second conductive sheets, wherein the first conductive sheets are at least partially interleaved with the second conductive sheets, and wherein the second conductive electrode is electrically insulated from the first conductive electrode;

    a ceramic material at least partially disposed between and contacting the first conductive sheets and the second conductive sheets; and

    microporous dielectric material at least partially disposed between and contacting the first conductive sheets and the second conductive sheets.

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