Semiconductor device and method for manufacturing the same

• US 9,019,440 B2
• Filed: 01/13/2012
• Issued: 04/28/2015
• Est. Priority Date: 01/21/2011
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kuwabara, Hideaki
• Primary Examiner(s): Vu, Phu
• Application Number:
  US13/349,744
• Publication Number:
  US 20120188478A1
• Time in Patent Office: 1,201 Days
• Field of Search: 349/43
• US Class Current: 349/43
• CPC Class Codes: G02F 1/134381 Hybrid switching mode, i.e. for applying an electric field with components parallel and orthogonal to the substrates
• CPC Class Codes: G02F 1/136231 for reducing the number of lithographic steps
• CPC Class Codes: G02F 1/136236 using a grey or half tone lithographic process
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/66742 Thin film unipolar transistors
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs

Abstract

An object is to reduce the number of photomasks used for manufacturing a transistor and manufacturing a display device to less than the conventional one. The display device is manufactured through, in total, three photolithography steps including one photolithography step which serves as both a step of forming a gate electrode and a step of forming an island-like semiconductor layer, one photolithography step of forming a contact hole after a planarization insulating layer is formed, and one photolithography step which serves as both a step of forming a source electrode and a drain electrode and a step of forming a pixel electrode.

Claims

1. A semiconductor device comprising:

a plurality of pixels;

a plurality of signal lines; and

a plurality of scan lines,

the plurality of pixels each comprising;

a transistor;

a capacitor; and

a liquid crystal element,

the transistor, which has a switching function, comprising;

a gate electrode;

an island-like semiconductor layer;

a source electrode;

a drain electrode;

a wiring;

a pixel electrode; and

a common electrode,

wherein the source electrode and the drain electrode are electrically connected to the island-like semiconductor layer through a contact hole,

wherein the pixel electrode is electrically connected to the source electrode or the drain electrode, and the liquid crystal element,

wherein the common electrode is electrically connected to the liquid crystal element,

wherein a portion of the capacitor where the wiring and the pixel electrode are overlapped with each other functions as a storage capacitor, and

wherein side surface of the first island-like insulating layer, the island-like semiconductor layer, and the second island-like insulating layer on one side are substantially aligned with one another, and each layer has a substantially similar shape when seen from the above.

2. The semiconductor device, according to claim 1, wherein the pixel electrode is comb-shaped.

3. The semiconductor device, according to claim 1, wherein the common electrode has a light-transmitting property.

4. The semiconductor device, according to claim 1, wherein the liquid crystal element comprises a liquid crystal exhibiting a blue phase.

5. The semiconductor device, according to claim 1, wherein an oxide semiconductor is used for the island-like semiconductor layer.

6. The semiconductor device, according to claim 1, wherein the gate electrode, the source electrode, or the drain electrode comprises a material containing copper.

7. A semiconductor device comprising:

a plurality of pixels;

a plurality of signal lines; and

a plurality of scan lines,

the plurality of pixels each comprising;

a plurality of transistors;

a capacitor; and

a light-emitting element,

the plurality of transistors, at least one of which functions as a supplier of driving current to the light-emitting element and at least another one of which has a switching function, comprising;

a first island-like insulating layer in contact with a gate electrode;

an island-like semiconductor layer in contact with the first island-like insulating layer;

a second island-like insulating layer in contact with the island-like semiconductor layer;

a third insulating layer which is in contact with the second island-like insulating layer and covers side surfaces of the island-like semiconductor layer;

a planarization insulating layer in contact with the third insulating layer;

a source electrode and a drain electrode electrically connected to the island-like semiconductor layer through a contact hole formed in the second island-like insulating layer, the third insulating layer, and the planarization insulating layer; and

a pixel electrode electrically connected to the source electrode or the drain electrode, and the light-emitting element,

wherein side surface of the first insulating layer, the island-like semiconductor layer, and the second island-like insulating layer on one side are substantially aligned with one another, and each layer has a substantially similar shape when seen from the above, and

the capacitor comprising;

a wiring;

an electrode; and

a dielectric layer formed with the first island-like insulating layer,

wherein a portion where the wiring and the electrode are overlapped with each other with the dielectric layer provided therebetween functions as a storage capacitor.

8. The semiconductor device, according to claim 7, further comprising a partition wall formed through a photolithography step.

9. The semiconductor device, according 5 to claim 7, wherein an oxide semiconductor is used for the island-like semiconductor layer.

10. The semiconductor device, according to claim 7, wherein the gate electrode, the source electrode, or the drain electrode comprises a material containing copper.