Spatial light modulator with integrated optical compensation structure
First Claim
1. A spatial light modulator, comprising:
- a substrate;
a plurality of individually addressable interferometric light-modulating elements configured to modulate light transmitted through the substrate, the interferometric light-modulating elements including a movable reflective layer; and
a plurality of optical compensation structures between the substrate and the plurality of individually addressable interferometric light-modulating elements, at least one of the optical compensation structures including a diffuser.
3 Assignments
0 Petitions
Accused Products
Abstract
A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.
-
Citations
22 Claims
-
1. A spatial light modulator, comprising:
-
a substrate; a plurality of individually addressable interferometric light-modulating elements configured to modulate light transmitted through the substrate, the interferometric light-modulating elements including a movable reflective layer; and a plurality of optical compensation structures between the substrate and the plurality of individually addressable interferometric light-modulating elements, at least one of the optical compensation structures including a diffuser. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. A spatial light modulator, comprising:
-
a substrate; a means for interferometrically modulating light transmitted through; a plurality of means for compensating the light transmitted through the substrate, the plurality of light compensating means between the substrate and the light modulating means, at least one of the light compensating means including a diffuser. - View Dependent Claims (17, 18, 19, 20, 21, 22)
-
Specification