Surface waveguide having a tapered region and method of forming

• US 9,020,317 B2
• Filed: 10/11/2013
• Issued: 04/28/2015
• Est. Priority Date: 10/11/2012
• Status: Active Grant

• Current Assignee: OctroliX B.V.
• Original Assignee: OctroliX B.V.
• Inventors: Heideman, Rene Gerrit, Leinse, Arne
• Primary Examiner(s): KIM, ELLEN E
• Application Number:
  US14/051,715
• Publication Number:
  US 20140105556A1
• Time in Patent Office: 564 Days
• Field of Search: 385129-132, 385/31, 385/39, 385/43, 427/163.2
• US Class Current: 385/131
• CPC Class Codes: G02B 6/14 Mode converters
• CPC Class Codes: G02B 6/305 and having an integrated mode-size expanding section, e.g. tapered waveguide

Abstract

A method for forming a waveguide having a thin-core region, a thick-core region, and a transition region of tapered thickness between them is disclosed. The method comprises forming a lower core layer of a first material on a lower cladding, forming a thin central core layer of a second material on the first core layer, forming an upper core layer of the first material on the central core layer, and etching the upper core layer in an etchant such that it is removed from the thin-core region and its thickness monotonically changes from its as-deposited thickness to extinction across the transition region, where the central core layer protects the lower core layer from exposure to the etchant.

Claims

1. An article comprising a surface waveguide having a core, wherein the surface waveguide includes:

(1) a first region in which the core includes;

(a) a first layer comprising a first material, the first layer having a first thickness;

(b) a second layer comprising the first material; and

(c) a third layer that is between the first layer and the second layer, the third layer comprising a second material, wherein the third layer enables optical coupling of the first layer and second layer such that they collectively support propagation of a light signal in the first region such that it has a first mode-field profile;

(2) a second region in which the core includes the second layer and not the first layer, wherein the core in the second region supports propagation of the light signal such that it has a second mode-field profile; and

(3) a transition region in which the core includes;

(a) the first layer, wherein the first layer has a thickness that changes monotonically from the first thickness to extinction;

(b) the second layer; and

(c) the third layer;

wherein the transition region is between the first region and the second region, and wherein the transition region is operative for adiabatically transitioning the mode-field profile of the light signal between the first mode-field profile and the second mode-field profile.

2. The article of claim 1, wherein the third layer has a thickness that is less than or equal to 500 nm.

3. The article of claim 1, wherein the second layer is between the substrate and the first layer.

4. The article of claim 1, wherein the first material comprises silicon nitride and the second material comprises a silicon oxide.

5. The article of claim 1, wherein the first layer includes a second tapered region, the second tapered region having a width that changes monotonically from a first width to a second width.

6. The article of claim 5, wherein the first tapered region and the second tapered region are co-located.

7. The article of claim 1, wherein the second layer has a second thickness that is thinner than the first thickness.

8. The article of claim 1, wherein the first layer is between the substrate and the second layer.

19. The article of claim 1, wherein the transition region is operative for adiabatically transitioning the mode-field profile of the light signal between the first mode-field profile and the second mode-field profile, and wherein the first mode-field profile and second mode-field profile have substantially the same cross-sectional shape, and further wherein the second mode-field profile is larger than the first mode-field profile.

20. The article of claim 19, wherein the cross-sectional shape is substantially circular.

9. A method for forming a surface waveguide on a substrate, the surface waveguide having a first region, a second region, and a transition region that optically couples the first region and second region, the method comprising:

(1) providing a first layer comprising a first material;

(2) forming a second layer comprising the first material;

(3) forming a third layer, wherein the third layer comprises a second material, and wherein the third layer is formed between the first layer and the second layer,

(4) etching the first layer to form a first tapered region in the transition region, wherein the first layer is etched such that the first tapered region has a thickness that changes monotonically from a first thickness to extinction, and wherein the first layer is etched via operations including;

(a) forming an accelerator layer on the first layer, the accelerator layer including a third material;

(b) forming a mask layer on the accelerator layer; and

(c) laterally etching the accelerator layer in a first etchant that etches each of the first material and the third material; and

(5) removing the first layer in the second region;

wherein the first layer, second layer, and third layer are formed such that the third layer optical couples the first layer and second layer such that the first layer and second layer collectively support propagation of light in the first region.

10. The method of claim 9, wherein the third layer is formed such that it has a thickness that is less than or equal to 500 nm.

11. The method of claim 9, wherein the second layer is formed between the substrate and the third layer.

12. The method of claim 9, wherein the first material comprises silicon nitride and the second material comprises a silicon oxide.

13. The method of claim 9, wherein the first layer is between the substrate and the second layer, and wherein the first tapered region is formed prior to the formation of the second layer.

14. The method of claim 9, further comprising (6) forming a second tapered region in the first layer, wherein the second tapered region has a width that changes monotonically from a first width to a second width.

15. The method of claim 14, wherein the second tapered region and the first tapered region are formed such that they are co-located.

16. A method for forming a surface waveguide having a first region, a second region, and a transition region that optically couples the first region and second region, the method comprising:

providing a first cladding layer, the first cladding layer comprising a first silicon oxide;

forming a first core layer, the first core layer having a first thickness, and the first core layer comprising silicon nitride;

forming a second core layer above the first core layer, the second core layer having a second thickness, and the second core layer comprising silicon nitride;

forming a third core layer that comprises a silicon oxide, wherein the third core layer is formed between the first core layer and the second core layer;

etching the first core layer to form a first tapered region in the transition region, the first tapered region having a thickness that changes monotonically from a third thickness to extinction; and

forming a second cladding layer, the second cladding layer comprising a second silicon oxide;

wherein the first core layer, second core layer, and third core layer are formed between the first cladding layer and second cladding layer; and

wherein the third core layer optically couples the first core layer and second core layer such that the first core layer and second core layer collectively support propagation of light in the first region.

17. The method of claim 16, wherein etching the first core layer removes it in the low-contrast region.

18. The method of claim 16, further comprising forming a second tapered region in the first core layer, wherein the second tapered region has a width that changes monotonically from a first width to a second width.