Oscillation type inertia force sensor

• US 9,021,879 B2
• Filed: 08/08/2012
• Issued: 05/05/2015
• Est. Priority Date: 02/17/2010
• Status: Expired due to Fees

• Current Assignee: Asahi Kasei Microdevices Corporation (Asahi Kasei Corporation), Murata Manufacturing Co Limited
• Original Assignee: Asahi Kasei Microdevices Corporation (Asahi Kasei Corporation), Murata Manufacturing Co Limited
• Inventors: Kato, Yoshitaka, Mori, Akira, Narita, Makoto
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US13/569,207
• Publication Number:
  US 20130192366A1
• Time in Patent Office: 1,000 Days
• Field of Search: 735/041.2, 735/041.4, 735/041.6, 735/040.2, 735/040.4
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5776 Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Abstract

An inertia force sensor that shortens a time from power activation until inertia force can be detected includes an oscillator, an oscillation circuit unit, and a detection circuit unit. The oscillation circuit unit functions as a closed loop self oscillation circuit with the oscillator as a resonant element, and includes a CV conversion circuit converting a monitor signal based on electrostatic capacitance according to an oscillating state of oscillator into a monitor signal based on a voltage corresponding to an amount in change of the electrostatic capacitance, and an automatic gain control circuit controlling gain based on the monitor signal converted at the CV conversion circuit to generate a driving signal, and supplying the driving signal to the oscillator. The CV conversion circuit includes an amplifier that amplifies a monitor signal with an amplification factor for a predetermined period after power activation.

Claims

1. An oscillation type inertia force sensor comprising:

an oscillator that is used to detect inertia force;

an oscillation circuit unit that supplies a driving signal to the oscillator; and

a detection circuit unit that detects inertia force of the oscillator;

wherein

the oscillation circuit unit is a self oscillation circuit of a closed loop with the oscillator defining a resonant element, and the oscillation circuit unit includes;

a signal conversion circuit that converts a monitor signal based on electrostatic capacitance according to an oscillating state of the oscillator into a monitor signal based on a voltage corresponding to an amount of change of the electrostatic capacitance; and

an automatic gain control circuit that amplifies the monitor signal converted at the signal conversion circuit with a gain controlled by a control signal to generate the driving signal, and that supplies the driving signal to the oscillator;

wherein

the automatic gain control circuit generates the control signal so that an amplitude of the monitor signal converted at the signal conversion circuit is constant;

the signal conversion circuit includes;

an operational amplifier that receives the monitor signal based on electrostatic capacitance and outputs the converted monitor signal to the automatic gain control circuit;

a first feedback capacitor;

a second feedback capacitor connected in parallel to the first feedback capacitor; and

a switch that switches connection and disconnection between each of the first and second feedback capacitors and the operational amplifier; and

the signal conversion circuit is configured to;

connect the operational amplifier to the first feedback capacitor and disconnect the operational amplifier from the second feedback capacitor via the switch for a period determined based on a change of the control signal from power activation;

connect the operational amplifier to at least the second feedback capacitor via the switch after the elapse of the determined period; and

output, for the determined period, the converted monitor signal which is amplified with an amplification factor greater than that after the elapse of the determined period.

2. The oscillation type inertia force sensor according to claim 1, wherein, when an amplification factor of an amplification circuit in the automatic gain control circuit has a negative property to the control signal, the determined period is a period during which the gain based on the control signal becomes less than or equal to a maximum gain of the amplification factor of the amplification circuit in a range where the gain varies corresponding to a change of the control signal after power activation.

3. The oscillation type inertia force sensor according to claim 1, wherein, when an amplification factor of an amplification circuit in the automatic gain control circuit has a positive property to the control signal, the determined period is a period during which the gain based on the control signal becomes greater than or equal to a maximum gain of the amplification factor of the amplification circuit in a range where the gain varies corresponding to a change of the control signal after power activation.

4. The oscillation type inertia force sensor according to claim 1, wherein

the first feedback capacitor is constantly connected to the operational amplifier.

5. The oscillation type inertia force sensor according to claim 1, wherein the signal conversion circuit is configured to connect the operational amplifier to the second feedback capacitor and disconnect the operational amplifier from the first feedback capacitor via the switch after the elapse of the determined period, and the first feedback capacitor has a capacitance smaller than that of the second feedback capacitor.