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Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer

  • US 9,021,880 B2
  • Filed: 12/30/2010
  • Issued: 05/05/2015
  • Est. Priority Date: 04/30/2010
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a substrate extending substantially in a first plane;

    a first plurality of electrodes formed substantially along a first axis on the substrate;

    a second plurality of electrodes formed substantially along a second axis on the substrate;

    a first central anchor attached to the substrate;

    a frame attached to the first central anchor and extending substantially in a second plane, the frame being substantially constrained for motion along the second axis; and

    a first proof mass attached to the frame and extending substantially in the second plane, the first proof mass having a first plurality of slots extending along the first axis and a second plurality of slots extending along the second axis, the first proof mass being conductive and being substantially constrained for motion along the first axis and along the second axis,wherein a lateral movement of the first proof mass in response to an applied lateral acceleration along the first axis results in a first change in capacitance at the second plurality of electrodes,wherein a lateral movement of the first proof mass in response to an applied lateral acceleration along the second axis results in a second change in capacitance at the first plurality of electrodes, andwherein the first and second pluralities of electrodes are formed substantially in a third plane that is disposed between the first plane and the second plane, the third plane separated from the second plane by a gap.

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