Powder feed rate sensor

• US 9,022,063 B2
• Filed: 05/28/2010
• Issued: 05/05/2015
• Est. Priority Date: 06/02/2009
• Status: Active Grant

• Current Assignee: First Solar Incorporated
• Original Assignee: First Solar Incorporated
• Inventors: Powell, Ricky C.
• Primary Examiner(s): MCCALISTER, WILLIAM M
• Application Number:
  US12/789,951
• Publication Number:
  US 20100304010A1
• Time in Patent Office: 1,803 Days
• Field of Search: 73/617.5, 738/61, 738/612.1, 732/79, 732/80, 732/81, 222/161, 222/196, 222/200, 406/14, 406/15, 406/16, 406/17, 406/18, 406/34, 406/74, 406/10, 137/486
• US Class Current: 137/486
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: G01F 1/30 for fluent solid material
• CPC Class Codes: G01F 1/64 by measuring electrical currents passing through the fluid flow; measuring electrical potential generated by the fluid flow, e.g. by electrochemical, contact or friction effects G01F1/58 takes precedence
• CPC Class Codes: G01F 1/66 by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
• CPC Class Codes: G01F 1/661 using light
• CPC Class Codes: G01F 1/666 by detecting noise and sounds generated by the flowing fluid
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow

Abstract

A powder feed rate sensor includes a surface or diaphragm configured to detect powder feed rate.

Claims

1. A closed loop powder feed rate control system for a material deposition system comprising:

a powder source having a controllable powder feed rate;

a powder output conduit configured to output powder from the powder source into a chamber, wherein the chamber comprises a gas inlet located in the chamber configured to introduce a carrier gas flow into the chamber;

a container positioned at an oblique angle relative to the powder output conduit, with an upper end located at an angle within the chamber, the container including;

a diaphragm located over the upper end of the container to receive powder directed onto the diaphragm from the conduit, the diaphragm emitting acoustic vibration pulses caused by the powder contacting the diaphragm, an acoustic sensor located within the container configured to detect the acoustic vibration pulses and convert the acoustic vibration pulses to an electrical signal, wherein the electrical signal is a representation of a powder feed rate, wherein after the powder contacts the diaphragm, it is entrained in the carrier gas flow and moved to a deposition system; and

a powder feed rate control module configured to control a rate of delivery of powder from the powder source based on the electrical signal.

2. The powder feed rate control system of claim 1, wherein the powder source comprises a vibratory bowl.

3. The powder feed rate control system of claim 1, wherein the powder feed rate control module comprises:

a feed back control module reading the electrical signal and adjusting the powder feed rate.

4. The powder feed rate control system of claim 2, wherein the vibratory bowl is contained within a sealed vessel.

5. The powder feed rate control system of claim 4, further comprising:

a vacuum module configured to apply a vacuum to the sealed vessel.

6. The powder feed rate control system of claim 4, further comprising:

a gas inlet connecting the sealed vessel to a carrier gas supply.

7. The powder feed rate control system of claim 1, wherein the acoustic sensor has a sensitivity range from about 500 mV/psi (72.5 mV/kPa) to about 50,000 mV/psi (7,250 mV/kPa).

8. The powder feed rate control system of claim 2, the powder feed rate control module further comprising:

an accelerometer configured to monitor and control vibration amplitude in the vibratory bowl; and

a vibration excitation unit configured to receive input from the accelerometer.

9. The powder feed rate control system of claim 2, wherein the powder source further comprises a hopper located above the vibratory bowl.