Substrate, template substrate, semiconductor light emitting element, semiconductor light emitting element producing method, illumination device using semiconductor light emitting element and electronic device
First Claim
1. A substrate for laminating a semiconductor layer thereon, wherein a plurality of protrusions in a hexagonal-pyramid shape is provided directly on the surface on which the semiconductor layer is laminated, and a side of the bottom surface of each of the plurality of protrusions is set in parallel with a side of the bottom surface of an adjacent protrusion,wherein the substrate is composed of single crystal sapphire whose C-plane is a principal plane, andat least two parallel sides of the hexagon of the bottom surface of each protrusion in the hexagonal-pyramid shape among the plurality of protrusions are set in parallel with an A-axis of the substrate.
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Accused Products
Abstract
Disclosed is a semiconductor light emitting element (LC) provided with a substrate (110) having one surface on which plural hexagonal-pyramid-shaped protrusions (110b) are provided, a base layer (130) provided so as to be in contact with the surface on which the protrusions (110b) are provided, an n-type semiconductor layer (140) provided so as to be in contact with the base layer (130), a light emitting layer (150) provided so as to be in contact with the n-type semiconductor layer (140), and a p-type semiconductor layer (160) provided so as to be in contact with the light emitting layer (150). Each protrusion (110b) scatters light in lateral and oblique directions within the semiconductor light emitting element (LC). The protrusions are densely arranged on a substrate on which semiconductor layers are laminated, so that the light extraction efficiency is improved.
30 Citations
10 Claims
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1. A substrate for laminating a semiconductor layer thereon, wherein a plurality of protrusions in a hexagonal-pyramid shape is provided directly on the surface on which the semiconductor layer is laminated, and a side of the bottom surface of each of the plurality of protrusions is set in parallel with a side of the bottom surface of an adjacent protrusion,
wherein the substrate is composed of single crystal sapphire whose C-plane is a principal plane, and at least two parallel sides of the hexagon of the bottom surface of each protrusion in the hexagonal-pyramid shape among the plurality of protrusions are set in parallel with an A-axis of the substrate.
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3. A substrate for laminating a semiconductor layer thereon, wherein a plurality of protrusions in a hexagonal-pyramid shape is provided directly on the surface on which the semiconductor layer is laminated, and a side of the bottom surface of each of the plurality of protrusions is set in parallel with a side of the bottom surface of an adjacent protrusion,
wherein the substrate is composed of single crystal sapphire whose C-plane is a principal plane, and at least two parallel sides of the hexagon of the bottom surface of each protrusion in the hexagonal-pyramid shape among the plurality of protrusions are set orthogonal to an A-axis of the substrate.
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4. A template substrate comprising:
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a substrate on one surface of which a plurality of protrusions in a hexagonal-pyramid shape is provided, a side of the bottom surface of each of the plurality of protrusions being set in parallel with a side of the bottom surface of an adjacent protrusion; and a group III-V compound semiconductor that is epitaxially grown on the one surface of the substrate, wherein the substrate is composed of single crystal sapphire whose C-plane is a principal plane, and at least two parallel sides of the hexagon of the bottom surface of each protrusion in the hexagonal-pyramid shape among the plurality of protrusions are set in parallel with an A-axis of the substrate. - View Dependent Claims (5)
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6. A semiconductor light emitting element comprising:
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a substrate on one surface of which a plurality of protrusions in a hexagonal-pyramid shape is provided, and a side of a bottom surface of each of the plurality of protrusions is set in parallel with a side of a bottom surface of an adjacent protrusion; and a laminated semiconductor layer that is provided on the substrate and includes a light emitting layer to emit light of a predetermined wavelength, wherein the substrate is composed of single crystal sapphire whose C-plane is a principal plane, and at least two parallel sides of the hexagon of the bottom surface of each protrusion in the hexagonal-pyramid shape among the plurality of protrusions are set in parallel with an A-axis of the substrate. - View Dependent Claims (7, 8)
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9. An illumination device comprising a semiconductor light emitting element, the semiconductor light emitting element including:
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a substrate on one surface of which a plurality of protrusions in a hexagonal-pyramid shape is provided, a side of the bottom surface of each of the plurality of protrusions being set in parallel with a side of the bottom surface of an adjacent protrusion; and a laminated semiconductor layer that is provided on the substrate and includes a light emitting layer to emit light of a predetermined wavelength, wherein the substrate is composed of single crystal sapphire whose C-plane is a principal plane, and at least two parallel sides of the hexagon of the bottom surface of each protrusion in the hexagonal-pyramid shape among the plurality of protrusions are set in parallel with an A-axis of the substrate.
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10. An electronic device comprising a semiconductor light emitting element, the semiconductor light emitting element including:
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a substrate on one surface of which a plurality of protrusions in a hexagonal-pyramid shape is provided, a side of the bottom surface of each of the plurality of protrusions being set in parallel with a side of the bottom surface of an adjacent protrusion; and a laminated semiconductor layer that is provided on the substrate and includes a light emitting layer to emit light of a predetermined wavelength, wherein the substrate is composed of single crystal sapphire whose C-plane is a principal plane, and at least two parallel sides of the hexagon of the bottom surface of each protrusion in the hexagonal-pyramid shape among the plurality of protrusions are set in parallel with an A-axis of the substrate.
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Specification