Communications interface database for electronic diagnostic apparatus
First Claim
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1. A method of testing semiconductor processing equipment by a diagnostic apparatus, comprising:
- detecting a connection to a mainframe of the semiconductor processing equipment, the mainframe providing a communication interface to one or more processing chambers physically coupled to the mainframe, wherein the one or more processing chambers perform semiconductor fabrication processes;
determining, with the diagnostic apparatus, an equipment class of the mainframe of the semiconductor processing equipment, the equipment class identifying a mainframe model designation and version of the mainframe, wherein the mainframe model designation identifies an individual equipment model and the version identifies a specific version of the equipment model specified in the mainframe model designation;
retrieving one or more attribute records matching the equipment class of the mainframe of the semiconductor processing equipment from an attribute database;
receiving a selection of one or more attributes included in the retrieved records, wherein each attribute is associated with a sensor measurement or an operating parameter of the one or more processing chambers;
for each selected attribute, identifying a conversion factor and an identifier from the retrieved attribute record uniquely determined by the equipment class of the mainframe, the selected attribute, and at least one of a chamber position or a chamber model designation of the one or more processing chambers;
retrieving, from the mainframe, attribute data that the mainframe associates with the identifier; and
transforming the attribute data into a physical unit of measurement using the conversion factor included in the attribute record, wherein the attribute record includes a first field identifying the equipment class, a second field identifying the attribute, and a third field specifying the identifier, wherein the version of the mainframe includes a version field having sub-fields that enable the version field to identify a range of versions of the equipment model.
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Abstract
A connection to an item of equipment is detected. An equipment class of the item of equipment is determined. A selection of an attribute associated with the item of equipment is received. An attribute record corresponding to the equipment class of the item of equipment and the selected attribute is retrieved from a database, wherein the attribute record enables a retrieval of a value of the selected attribute from the item of equipment.
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Citations
19 Claims
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1. A method of testing semiconductor processing equipment by a diagnostic apparatus, comprising:
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detecting a connection to a mainframe of the semiconductor processing equipment, the mainframe providing a communication interface to one or more processing chambers physically coupled to the mainframe, wherein the one or more processing chambers perform semiconductor fabrication processes; determining, with the diagnostic apparatus, an equipment class of the mainframe of the semiconductor processing equipment, the equipment class identifying a mainframe model designation and version of the mainframe, wherein the mainframe model designation identifies an individual equipment model and the version identifies a specific version of the equipment model specified in the mainframe model designation; retrieving one or more attribute records matching the equipment class of the mainframe of the semiconductor processing equipment from an attribute database; receiving a selection of one or more attributes included in the retrieved records, wherein each attribute is associated with a sensor measurement or an operating parameter of the one or more processing chambers; for each selected attribute, identifying a conversion factor and an identifier from the retrieved attribute record uniquely determined by the equipment class of the mainframe, the selected attribute, and at least one of a chamber position or a chamber model designation of the one or more processing chambers; retrieving, from the mainframe, attribute data that the mainframe associates with the identifier; and transforming the attribute data into a physical unit of measurement using the conversion factor included in the attribute record, wherein the attribute record includes a first field identifying the equipment class, a second field identifying the attribute, and a third field specifying the identifier, wherein the version of the mainframe includes a version field having sub-fields that enable the version field to identify a range of versions of the equipment model. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A non-transitory computer readable medium including instructions that, when executed by a computer, cause the computer to perform a method of testing semiconductor processing equipment by a diagnostic apparatus, comprising:
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detecting a connection to a mainframe of the semiconductor processing equipment, the mainframe providing a communication interface to one or more processing chambers physically coupled to the mainframe, wherein the one or more processing chambers perform semiconductor fabrication processes; determining, with the diagnostic apparatus, an equipment class of the mainframe of the semiconductor processing equipment, the equipment class identifying a mainframe model designation and version of the mainframe, wherein the mainframe model designation identifies an individual equipment model and the version identifies a specific version of the equipment model specified in the mainframe model designation; retrieving one or more attribute records matching the equipment class of the mainframe of the semiconductor processing equipment from an attribute database; receiving a selection of one or more attributes included in the retrieved records, wherein each attribute is associated with a sensor measurement or an operating parameter of the one or more processing chambers; for each selected attribute, identifying a conversion factor and an identifier from the retrieved attribute record uniquely determined by the equipment class of the mainframe, the selected attribute, and at least one of a chamber position or a chamber model designation of the one or more processing chambers; retrieving, from the mainframe, attribute data that the mainframe associates with the identifier; and transforming the attribute data into a physical unit of measurement using the conversion factor included in the attribute record, wherein the attribute record includes a first field identifying the equipment class, a second field identifying the attribute, and a third field specifying the identifier, wherein the version of the mainframe includes a version field having sub-fields that enable the version field to identify a range of versions of the equipment model. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A diagnostic apparatus comprising:
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a digital communications interface and an analog communications interface to connect with a mainframe of a semiconductor processing equipment, the mainframe providing a communication interface to one or more processing chambers physically coupled to the mainframe, wherein the one or more processing chambers perform semiconductor fabrication processes; an attribute database to store a plurality of attribute records, one or more of the plurality of attribute records including an equipment class identifying a mainframe model designation and version, an attribute associated with a conversion factor and the equipment class, and an identifier uniquely determined by the equipment class, the attribute, and at least one of a chamber position or a chamber model designation of the one or more processing chambers, wherein each attribute is a sensor measurement or an operating parameter of the one or more processing, wherein the mainframe model designation identifies an individual equipment model and the version identifies a specific version of the equipment model specified in the mainframe model designation; an attribute lookup module, coupled with the digital communications interface and the attribute database, to determine an equipment class of the mainframe, to receive a selection of an attribute associated with the equipment class, the selection including a selection of at least one of a chamber position or a chamber model, and to retrieve an attribute record associated with the equipment class, the selected attribute, and at least one of the chamber model and chamber position, in the attribute database; and a data collector to retrieve, from the mainframe, attribute data via the digital communications interface or the analog communications interface using the identifier from the retrieved attribute record, and to transform the attribute data into physical units of measurement using the conversion factor included in the attribute record, wherein the attribute record includes a first field identifying the equipment class, a second field identifying the attribute, and a third field specifying the identifier, wherein the version of the mainframe includes a version field having sub-fields that enable the version field to identify a range of versions of the equipment model. - View Dependent Claims (14, 15, 16, 17)
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18. A method of testing semiconductor processing
equipment by a diagnostic apparatus, comprising: -
detecting a connection to a mainframe of the semiconductor processing equipment, the mainframe providing a communication interface to one or more processing chambers physically coupled to the mainframe, the communication interface including at least one data port coupled to each of the processing chamber and to a communications channel managed by a processor of the mainframe, wherein the one or more processing chambers perform semiconductor fabrication processes; determining, with the diagnostic apparatus, an equipment class of the mainframe of the semiconductor processing equipment, the equipment class including a model and version of the mainframe, wherein the model identifies an individual equipment model and the version identifies a specific version of the equipment model specified in the model; retrieving one or more attribute records matching the equipment class of the mainframe from an attribute database; receiving a selection of one or more attributes comprising a sensor measurement, an operating parameter of the equipment class of the mainframe, or at least one of a chamber position or a chamber model uniquely identifying each of the one or more processing chambers; for each selected attribute, identifying an attribute record corresponding to the equipment class and the selected attribute, wherein the attribute record includes an identifier associated with the equipment class and the selected attribute; and retrieving, from the mainframe, attribute data that the mainframe associates with the identifier, wherein the attribute record includes a first field identifying the equipment class, a second field identifying the attribute, and a third field specifying the identifier, wherein the version of the mainframe includes a version field having sub-fields that enable the version field to identify a range of versions of the equipment model. - View Dependent Claims (19)
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Specification